Samsung electronics co., ltd. (20240414925). SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
Organization Name
Inventor(s)
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
This abstract first appeared for US patent application 20240414925 titled 'SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
Original Abstract Submitted
a semiconductor device has, in a gate insulating layer, in an xps spectrum of o s obtained by an x-ray photoelectron spectroscopy (xps) using a monochromatic aluminum k� (1486.6 ev) source, a ratio (%) of an al—o peak observed in a binding energy of about 530.3 ev to about 531.6 ev to all peaks of greater than or equal to about 80%.