18073980. STEALTH DICING LASER DEVICE simplified abstract (Samsung Electronics Co., Ltd.)
Contents
STEALTH DICING LASER DEVICE
Organization Name
Inventor(s)
Akinori Okubo of Hwaseong-si (KR)
Youngchul Kwon of Asan-si (KR)
Jungchul Lee of Hwaseong-si (KR)
Deoksuk Jang of Pyeongtaek-si (KR)
STEALTH DICING LASER DEVICE - A simplified explanation of the abstract
This abstract first appeared for US patent application 18073980 titled 'STEALTH DICING LASER DEVICE
Simplified Explanation
The abstract describes a stealth dicing laser device that includes a pulse laser generator, a condenser lens, a pupil filter, and a controller. The pupil filter transforms the phase of the laser light based on a phase control signal provided by the controller.
- The device includes a pulse laser generator that generates laser light.
- A condenser lens is placed in the optical path of the laser light.
- A pupil filter is used to transform the phase of the laser light before it passes through the condenser lens.
- The controller provides a phase control signal to the pupil filter.
- The pupil filter transforms the phase of the laser light based on the phase control signal.
- The phase control signal is a signal that transforms the phase expression of the laser light based on a parameter.
Potential Applications
- Stealth dicing in semiconductor manufacturing.
- Precision cutting and dicing in various industries.
- Laser-based material processing and micromachining.
Problems Solved
- Enables stealth dicing, which minimizes debris and reduces the risk of contamination in semiconductor manufacturing.
- Provides precise control over the phase of the laser light, improving the quality and accuracy of cutting and dicing processes.
- Reduces the need for post-processing and enhances overall efficiency.
Benefits
- Minimizes debris and contamination in semiconductor manufacturing.
- Enables high-precision cutting and dicing with improved accuracy.
- Enhances efficiency and reduces the need for additional post-processing steps.
- Provides flexibility in controlling the phase of the laser light for different applications.
Original Abstract Submitted
A stealth dicing laser device including: a pulse laser generator configured to generate laser light; a condenser lens formed in an optical path of the laser light; a pupil filter configured to transform a phase of the laser light before the laser light passes through the condenser lens; and a controller configured to provide a phase control signal to the pupil filter, wherein the pupil filter transforms the phase of the laser light based on the phase control signal, wherein the phase control signal is a signal transforming a phase expression of the laser light based on a parameter.
