Taiwan semiconductor manufacturing company, ltd. (20240381034). TOP NOTCH SLIT PROFILE FOR MEMS DEVICE simplified abstract
Contents
TOP NOTCH SLIT PROFILE FOR MEMS DEVICE
Organization Name
taiwan semiconductor manufacturing company, ltd.
Inventor(s)
Ting-Jung Chen of Kaohsiung City (TW)
TOP NOTCH SLIT PROFILE FOR MEMS DEVICE - A simplified explanation of the abstract
This abstract first appeared for US patent application 20240381034 titled 'TOP NOTCH SLIT PROFILE FOR MEMS DEVICE
The abstract of this patent application describes a microelectromechanical systems (MEMS) device with a top-notch slit profile at a movable mass, which can be used in applications such as speakers or actuators. The slit extends through the movable mass with a uniform width from top to bottom, and the top corners of the MEMS substrate in the slit are notched to create a bulge at the top of the movable mass.
- The MEMS device features a top-notch slit profile with a uniform width from top to bottom, enhancing the process window for removing adhesive during formation.
- The notched top corners of the MEMS substrate in the slit contribute to the bulging effect at the top of the movable mass.
- The innovation can be applied in various MEMS devices like speakers and actuators, improving their performance and reliability.
- The top-notch slit profile increases the efficiency of manufacturing processes by providing a wider margin for error in adhesive removal.
- This technology offers a practical solution for enhancing the functionality and durability of MEMS devices in different applications.
Potential Applications: - MEMS speakers - MEMS actuators - MEMS sensors
Problems Solved: - Enhanced process window for adhesive removal during manufacturing - Improved performance and reliability of MEMS devices
Benefits: - Increased manufacturing efficiency - Enhanced functionality and durability of MEMS devices - Improved overall performance in various applications
Commercial Applications: Potential commercial uses include MEMS devices in consumer electronics, automotive systems, and medical devices. The technology can benefit manufacturers looking to improve the quality and performance of their MEMS products.
Questions about MEMS Devices with Top-Notch Slit Profile: 1. How does the top-notch slit profile improve the manufacturing process of MEMS devices? The top-notch slit profile provides a wider process window for removing adhesive during manufacturing, increasing efficiency and reducing errors.
2. What are the potential applications of MEMS devices with a top-notch slit profile? MEMS devices with a top-notch slit profile can be used in speakers, actuators, sensors, and other applications where precise movement and control are required.
Original Abstract Submitted
various embodiments of the present disclosure are directed towards a microelectromechanical systems (mems) device in which a slit at a movable mass of the mems device has a top notch slit profile. the mems device may, for example, be a speaker, an actuator, or the like. the slit extends through the movable mass, from top to bottom, and has a width that is uniform, or substantially uniform, from the bottom of the movable mass to proximate the top of movable mass. further, in accordance with the top notch slit profile, top corner portions of the mems substrate in the slit are notched, such that a width of the slit bulges at the top of the movable mass. the top notch slit profile may, for example, increase the process window for removing an adhesive from the slit while forming the mems device.
