Taiwan semiconductor manufacturing company, ltd. (20240379471). SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION simplified abstract
Contents
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
Organization Name
taiwan semiconductor manufacturing company, ltd.
Inventor(s)
Kuang-Wei Cheng of Hsinchu City (TW)
Yung-Tsun Liu of Taipei City (TW)
Chih-Tsung Lee of Hsinchu City (TW)
Chyi-Tsong Ni of Hsinchu City (TW)
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION - A simplified explanation of the abstract
This abstract first appeared for US patent application 20240379471 titled 'SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
Simplified Explanation:
The abstract discusses a method to detect and monitor the position of a diaphragm in a valve using a sensor. This allows for the monitoring of fluid flow through the valve, identification of diaphragm failures, and quick termination of tool operation to reduce substrate scrap and increase processing quality and yields in semiconductor manufacturing.
Key Features and Innovation:
- Detection and monitoring of diaphragm position in a valve using a sensor.
- Ability to determine fluid flow through the valve based on diaphragm position.
- Identification and detection of diaphragm failures.
- Quick termination of tool operation in case of diaphragm issues.
- Reduction of substrate scrap and improvement in semiconductor processing quality and yields.
Potential Applications: This technology can be applied in various industries such as semiconductor manufacturing, chemical processing, and pharmaceutical production where precise control of fluid flow is crucial.
Problems Solved:
- Monitoring and detecting diaphragm failures in valves.
- Improving semiconductor processing quality and yields.
- Reducing substrate scrap in manufacturing processes.
Benefits:
- Enhanced monitoring and control of fluid flow.
- Increased reliability and efficiency in manufacturing processes.
- Cost savings through reduced scrap and improved yields.
Commercial Applications: The technology can be utilized in semiconductor fabrication facilities, chemical plants, and pharmaceutical manufacturing plants to enhance process control and efficiency, leading to improved product quality and reduced waste.
Questions about Diaphragm Position Monitoring: 1. How does the sensor in the valve detect the position of the diaphragm? 2. What are the specific benefits of using this technology in semiconductor manufacturing processes?
2. Another relevant generic question, with a detailed answer: - How does monitoring the diaphragm position in a valve contribute to reducing substrate scrap in semiconductor manufacturing? - By monitoring the diaphragm position, the sensor can quickly detect any issues or failures, allowing for immediate action to be taken to prevent further damage to the substrate. This proactive approach helps minimize scrap and ensures that only high-quality products are produced, ultimately leading to cost savings and improved overall efficiency in the manufacturing process.
Original Abstract Submitted
a diaphragm position of a valve may be detected and/or determined such that operation of the diaphragm may be monitored. a sensor included in the valve may generate sensor data that may be used to monitor the position of the diaphragm, which in turn may be used to determine a flow of a fluid through the valve. in this way, the sensor may be used to determine whether the diaphragm is properly functioning, may be used to identify and detect failures of the diaphragm, and/or may be used to quickly terminate operation of an associated deposition tool. this may reduce semiconductor substrate scrap, may reduce device failures on semiconductor substrates that are processed by the deposition tool, may increase semiconductor processing quality of the deposition tool, and/or may increase semiconductor processing yields of the deposition tool.
