Taiwan semiconductor manufacturing company, ltd. (20240379401). SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION simplified abstract
Contents
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
Organization Name
taiwan semiconductor manufacturing company, ltd.
Inventor(s)
Chung-Pin Chou of Hsinchu City (TW)
Kai-Lin Chuang of Chia-Yi City (TW)
Sheng-Wen Huang of Taichung City (TW)
Yan-Cheng Chen of Taichung City (TW)
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION - A simplified explanation of the abstract
This abstract first appeared for US patent application 20240379401 titled 'SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
Simplified Explanation: This patent application describes a semiconductor processing tool with an electrostatic chuck that includes a voltage-regulation system to maintain a consistent electrical potential across different regions of a semiconductor substrate.
- The voltage-regulation system can detect when the electrical potential in a region of the substrate falls below a certain threshold.
- In response, the system can place electrically-conductive pins in the region to adjust the electrical potential.
- The pins alter the electrical potential within the region to ensure uniform processing of the semiconductor substrate.
Key Features and Innovation:
- Voltage-regulation system for maintaining consistent electrical potential in semiconductor substrate regions.
- Electrically-conductive pins used to adjust electrical potential in regions below a threshold.
- Ensures uniform processing of semiconductor substrates.
Potential Applications:
- Semiconductor manufacturing processes.
- Integrated circuit fabrication.
- Thin film deposition.
Problems Solved:
- Inconsistent electrical potential across semiconductor substrate regions.
- Ensuring uniform processing for high-quality semiconductor devices.
Benefits:
- Improved semiconductor processing quality.
- Enhanced efficiency in manufacturing processes.
- Consistent performance of semiconductor devices.
Commercial Applications:
- Semiconductor fabrication facilities.
- Electronics manufacturing companies.
- Research institutions in the semiconductor industry.
Questions about Semiconductor Processing Tool: 1. How does the voltage-regulation system in the semiconductor processing tool work? 2. What are the advantages of using electrically-conductive pins to adjust the electrical potential in semiconductor substrate regions?
Frequently Updated Research: Ongoing research in semiconductor processing tools focuses on enhancing precision and efficiency in semiconductor manufacturing processes. Researchers are exploring new materials and technologies to further improve the performance of these tools.
Original Abstract Submitted
some implementations described herein provide techniques and apparatuses for a semiconductor processing tool including an electrostatic chuck having a voltage-regulation system to regulate an electrical potential throughout regions of a semiconductor substrate positioned above the electrostatic chuck. the voltage-regulation system may determine that an electrical potential within a region of the semiconductor substrate does not satisfy a threshold. the voltage-regulation system may, based on determining that the electrical potential throughout the region does not satisfy the threshold, position one or more electrically-conductive pins within the region. while positioned within the region, the one or more electrically-conductive pins may change the electrical potential of the region.
