Taiwan semiconductor manufacturing company, ltd. (20240379398). SEMICONDUCTOR PROCESSING TOOL AND METHOD OF OPERATION simplified abstract

SEMICONDUCTOR PROCESSING TOOL AND METHOD OF OPERATION

Organization Name

taiwan semiconductor manufacturing company, ltd.

Inventor(s)

Yan-Chun Liu of Taichung City (TW)

Yii-Chi Lin of Taipei City (TW)

Shahaji B. More of Hsinchu City (TW)

Chih-Yu Ma of Hsinchu City (TW)

Sheng-Jang Liu of Hsinchu County (TW)

Shih-Chieh Chang of Taipei City (TW)

Ching-Lun Lai of Taichung City (TW)

SEMICONDUCTOR PROCESSING TOOL AND METHOD OF OPERATION - A simplified explanation of the abstract

This abstract first appeared for US patent application 20240379398 titled 'SEMICONDUCTOR PROCESSING TOOL AND METHOD OF OPERATION

The abstract of the patent application describes a control device that uses optical sensors to measure the spacing and gapping dimensions between a wafer and a pre-heat ring in a semiconductor processing tool. Based on these measurements, the control device generates commands to adjust the susceptor position.

• The control device determines spacing and gapping measurements using optical sensors.
• Commands are generated based on the process settings and measurements.
• Commands are sent to motors to move the susceptor accordingly.

Potential Applications: - Semiconductor manufacturing - Wafer processing - Automated control systems in industrial settings

Problems Solved: - Ensuring precise positioning of wafers in semiconductor processing tools - Improving process efficiency and accuracy - Reducing manual adjustments and human error

Benefits: - Enhanced process control and accuracy - Increased productivity and yield in semiconductor manufacturing - Cost savings through automation and reduced downtime

Commercial Applications: Title: "Automated Wafer Positioning System for Semiconductor Processing Tools" This technology can be used in semiconductor fabrication facilities to streamline wafer processing, improve yield, and reduce operational costs. It can also be integrated into automated manufacturing systems for other industries requiring precise positioning control.

Prior Art: Researchers can explore prior patents related to optical sensor-based control systems in semiconductor manufacturing tools, as well as automation technologies for industrial processes.

Frequently Updated Research: Researchers in the field of semiconductor manufacturing are continuously exploring new methods to enhance process control and automation. Stay updated on the latest advancements in optical sensor technology and automated control systems for semiconductor processing tools.

Questions about the technology: 1. How does the control device use optical sensors to measure spacing and gapping dimensions? 2. What are the key advantages of using automated control systems in semiconductor manufacturing?

Original Abstract Submitted

in some implementations, a control device may determine a spacing measurement in a first dimension between a wafer on a susceptor and a pre-heat ring of a semiconductor processing tool and/or a gapping measurement in a second dimension between the wafer and the pre-heat ring, using one or more images captured in situ during a process by at least one optical sensor. accordingly, the control device may generate a command based on a setting associated with the process being performed by the semiconductor processing tool and the spacing measurement and/or the gapping measurement. the control device may provide the command to at least one motor to move the susceptor.