Taiwan semiconductor manufacturing company, ltd. (20240377586). Fabrication Process Control In Optical Devices simplified abstract
Contents
Fabrication Process Control In Optical Devices
Organization Name
taiwan semiconductor manufacturing company, ltd.
Inventor(s)
Weiwei Song of San Jose CA (US)
Chan-Hong Chern of Palo Alto CA (US)
Chih-Chang Lin of San Jose CA (US)
Stefan Rusu of Sunnyvale CA (US)
Min-Hsiang Hsu of Hsinchu (TW)
Fabrication Process Control In Optical Devices - A simplified explanation of the abstract
This abstract first appeared for US patent application 20240377586 titled 'Fabrication Process Control In Optical Devices
Simplified Explanation: The patent application describes a method for fabricating optical devices using high refractive index materials. This method involves creating a patterned template layer with trenches, forming waveguides and optical couplers within the trenches, and depositing a cladding layer on top.
- The method includes forming a first oxide layer on a substrate.
- A patterned template layer with trenches is created on the first oxide layer.
- Waveguides and optical couplers are formed within the trenches.
- A cladding layer is deposited on the waveguides and optical couplers.
- The materials used have a high refractive index, enhancing the optical properties of the devices.
Key Features and Innovation:
- Fabrication of optical devices using high refractive index materials.
- Formation of waveguides and optical couplers within trenches.
- Deposition of a cladding layer to enhance optical properties.
Potential Applications: This technology can be used in telecommunications, photonics, and optical sensing applications.
Problems Solved: This method addresses the challenge of fabricating optical devices with high refractive index materials efficiently and effectively.
Benefits:
- Improved optical performance.
- Enhanced signal transmission.
- Increased efficiency in optical device fabrication.
Commercial Applications: Potential commercial applications include telecommunications equipment, optical sensors, and high-speed data transmission devices.
Questions about Optical Device Fabrication with High Refractive Index Materials: 1. How does the use of high refractive index materials impact the performance of optical devices? 2. What are the key advantages of forming waveguides and optical couplers within trenches in the fabrication process?
Original Abstract Submitted
methods of fabricating optical devices with high refractive index materials are disclosed. the method includes forming a first oxide layer on a substrate and forming a patterned template layer with first and second trenches on the first oxide layer. a material of the patterned template layer has a first refractive index. the method further includes forming a first portion of a waveguide and a first portion of an optical coupler within the first and second trenches, respectively, forming a second portion of the waveguide and a second portion of the optical coupler on a top surface of the patterned template layer, and depositing a cladding layer on the second portions of the waveguide and optical coupler. the waveguide and the optical coupler include materials with a second refractive index that is greater than the first refractive index.
