Taiwan semiconductor manufacturing company, ltd. (20240375236). SIMPLIFIED CARRIER REMOVABLE BY REDUCED NUMBER OF CMP PROCESSES simplified abstract

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SIMPLIFIED CARRIER REMOVABLE BY REDUCED NUMBER OF CMP PROCESSES

Organization Name

taiwan semiconductor manufacturing company, ltd.

Inventor(s)

Chun-Wei Chang of Hsinchu (TW)

Ming-Fa Chen of Taichung City (TW)

Chao-Wen Shih of Zhubei City (TW)

Ting-Chu Ko of Hsinchu (TW)

SIMPLIFIED CARRIER REMOVABLE BY REDUCED NUMBER OF CMP PROCESSES - A simplified explanation of the abstract

This abstract first appeared for US patent application 20240375236 titled 'SIMPLIFIED CARRIER REMOVABLE BY REDUCED NUMBER OF CMP PROCESSES

Simplified Explanation: The method described in the patent application involves bonding a package component on a composite carrier and then performing multiple polishing processes to remove layers of the composite carrier, stopping at specific layers within the carrier.

  • The method involves bonding a first package component on a composite carrier.
  • A first polishing process is performed to remove the base carrier of the composite carrier, stopping on a first layer.
  • A second polishing process removes the first layer of the composite carrier, stopping on a second layer.
  • A third polishing process removes multiple layers in the composite carrier, including the second layer, stopping on a dielectric layer in the first package component.

Key Features and Innovation:

  • Multi-step polishing process to remove layers of a composite carrier.
  • Precise stopping points at specific layers within the composite carrier.
  • Efficient removal of layers without damaging the package component.

Potential Applications:

  • Semiconductor manufacturing
  • Microelectronics industry
  • Integrated circuit packaging

Problems Solved:

  • Efficient removal of layers in a composite carrier
  • Precision polishing process for delicate components
  • Minimizing damage during carrier removal

Benefits:

  • Improved manufacturing processes
  • Enhanced product quality
  • Cost-effective production methods

Commercial Applications: The technology described in this patent application could be used in the semiconductor industry for the precise manufacturing of integrated circuits, leading to improved product quality and cost-effective production methods.

Questions about the Technology: 1. How does the multi-step polishing process improve the manufacturing of semiconductor components? 2. What are the potential cost savings associated with using this technology in the microelectronics industry?


Original Abstract Submitted

a method includes bonding a first package component on a composite carrier, and performing a first polishing process on the composite carrier to remove a base carrier of the composite carrier. the first polishing process stops on a first layer of the composite carrier. a second polishing process is performed to remove the first layer of the composite carrier. the second polishing process stops on a second layer of the composite carrier. a third polishing process is performed to remove a plurality of layers in the composite carrier. the plurality of layers include the second layer, and the third polishing process stops on a dielectric layer in the first package component.