Samsung electronics co., ltd. (20240379345). APPARATUS FOR CLEANING A SEMICONDUCTOR FABRICATION CHAMBER simplified abstract

APPARATUS FOR CLEANING A SEMICONDUCTOR FABRICATION CHAMBER

Organization Name

samsung electronics co., ltd.

Inventor(s)

Jeongmin Hwang of Suwon-si (KR)

Jongseong Ko of Suwon-si (KR)

Daeyong Kim of Suwon-si (KR)

Donghyun Kim of Suwon-si (KR)

Jisu Kim of Suwon-si (KR)

Pyungkang Kim of Suwon-si (KR)

Kihong Park of Suwon-si (KR)

Jungjoon Park of Suwon-si (KR)

Jungjun Park of Suwon-si (KR)

Jooyoung Park of Suwon-si (KR)

Junhyeok Park of Suwon-si (KR)

Hoseok Song of Suwon-si (KR)

Chiho Ahn of Suwon-si (KR)

Kongwoo Lee of Suwon-si (KR)

Hyunyoung Lee of Suwon-si (KR)

Chuyoung Choung of Suwon-si (KR)

APPARATUS FOR CLEANING A SEMICONDUCTOR FABRICATION CHAMBER - A simplified explanation of the abstract

This abstract first appeared for US patent application 20240379345 titled 'APPARATUS FOR CLEANING A SEMICONDUCTOR FABRICATION CHAMBER

• • Simplified Explanation:**

The patent application describes an apparatus for cleaning a semiconductor fabrication chamber using a non-contact cleaning module, an inspection module, and a drive module. The cleaning module removes contaminants from the chamber's inner walls, while the inspection module checks the cleaning process. The drive module moves both modules within the chamber.

• • Key Features and Innovation:**
• Non-contact cleaning of semiconductor fabrication chamber
• Inspection module to verify cleaning process
• Drive module for moving cleaning and inspection modules
• Effective removal of contaminants with complicated shapes

• • Potential Applications:**

This technology can be used in semiconductor manufacturing facilities, cleanroom environments, and other industries requiring precise cleaning of complex surfaces.

• • Problems Solved:**
• Efficient removal of contaminants in hard-to-reach areas
• Ensuring thorough cleaning of semiconductor fabrication chambers
• Simplifying the cleaning process in sensitive manufacturing environments

• • Benefits:**
• Improved cleanliness and efficiency in semiconductor fabrication
• Reduced risk of contamination in manufacturing processes
• Enhanced quality control through inspection module

• • Commercial Applications:**

Potential commercial applications include semiconductor fabrication facilities, cleanroom equipment manufacturers, and companies specializing in precision cleaning technologies.

• • Questions about Semiconductor Fabrication Chamber Cleaning:**

1. How does the non-contact cleaning module effectively remove contaminants in the semiconductor fabrication chamber? 2. What are the advantages of using an inspection module to verify the cleaning process in semiconductor manufacturing?

Original Abstract Submitted

an apparatus for cleaning a semiconductor fabrication chamber may include a cleaning module, an inspection module and a drive module. the cleaning module may clean an inner area of the semiconductor fabrication chamber in a non-contact manner. the inspection module may be configured to inspect a cleaning of the semiconductor fabrication chamber by the cleaning module. the drive module may be configured to move the cleaning module and the inspection module in the semiconductor fabrication chamber. thus, the non-contact type cleaning module may effectively remove the contaminant on an inner wall of the semiconductor fabrication chamber having a complicated shape and/or a part on the inner wall of the semiconductor fabrication chamber having a complicated shape.