Samsung electronics co., ltd. (20240353795). HOLOGRAPHIC MICROSCOPE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE USING THE SAME simplified abstract

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HOLOGRAPHIC MICROSCOPE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE USING THE SAME

Organization Name

samsung electronics co., ltd.

Inventor(s)

Seungbeom Park of Gwangju (KR)

Sungmin Park of Seoul (KR)

Jaehyeon Son of Hwaseong-si (KR)

Heejun Ahn of Seoul (KR)

Myungjun Lee of Seongnam-si (KR)

HOLOGRAPHIC MICROSCOPE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE USING THE SAME - A simplified explanation of the abstract

This abstract first appeared for US patent application 20240353795 titled 'HOLOGRAPHIC MICROSCOPE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE USING THE SAME

The holographic microscope described in the abstract utilizes an input optical system to emit a polarized input beam, a first beam splitter to separate the input beam into an object beam and a reference beam, and a reference optical system to further split the reference beam into two separate beams.

  • The microscope includes a camera with a micro polarizer array to capture the object beam reflected by an inspection object, along with the two reference beams with perpendicular polarization axes.
  • The use of polarized beams and a micro polarizer array allows for precise and detailed imaging of the inspection object.
  • This technology enables high-resolution holographic imaging for various applications in microscopy, inspection, and analysis.
  • By separating the reference beam into two perpendicular beams, the system can accurately reconstruct the holographic image of the object.
  • The holographic microscope offers improved imaging capabilities and accuracy compared to traditional microscopy techniques.

Potential Applications: - Medical diagnostics - Material analysis - Quality control in manufacturing - Scientific research and experimentation

Problems Solved: - Enhanced imaging resolution and accuracy - Improved holographic reconstruction of objects - Precise analysis and inspection capabilities

Benefits: - High-resolution holographic imaging - Accurate reconstruction of object details - Versatile applications in various fields - Improved quality control and analysis processes

Commercial Applications: Title: Advanced Holographic Microscope for Precision Imaging This technology can be utilized in industries such as healthcare, materials science, and manufacturing for detailed analysis and quality control purposes. The high-resolution imaging capabilities can lead to improved product development and research outcomes.

Prior Art: Prior research in holographic microscopy and polarized imaging techniques can provide valuable insights into the development and applications of this technology.

Frequently Updated Research: Researchers are constantly exploring new ways to enhance holographic imaging techniques, including advancements in polarizer arrays and beam splitting methods.

Questions about Holographic Microscope: 1. How does the use of polarized beams improve imaging quality in the holographic microscope? - The use of polarized beams helps reduce noise and improve contrast in the captured images, leading to higher-quality holographic reconstructions.

2. What are the key differences between traditional microscopy and holographic microscopy in terms of imaging capabilities? - Holographic microscopy offers three-dimensional imaging and improved depth perception compared to traditional microscopy techniques.


Original Abstract Submitted

provided is a holographic microscope including an input optical system configured to emit polarized input beam, a first beam splitter configured to emit an object beam by reflecting a portion of the polarized input beam, and emit a reference beam by transmitting a remaining portion of the polarized input beam, a reference optical system configured to separate the reference beam into a first reference beam and a second reference beam, a camera configured to receive the first reference beam and the second reference beam and the object beam that is reflected by an inspection object, the camera including a micro polarizer array, wherein a first polarization axis of the first reference beam is perpendicular to a second polarization axis of the second reference beam.