18627916. TWO-AXIS MEMS MIRROR simplified abstract (Murata Manufacturing Co., Ltd.)
Contents
- 1 TWO-AXIS MEMS MIRROR
- 1.1 Organization Name
- 1.2 Inventor(s)
- 1.3 TWO-AXIS MEMS MIRROR - A simplified explanation of the abstract
- 1.4 Simplified Explanation
- 1.5 Key Features and Innovation
- 1.6 Potential Applications
- 1.7 Problems Solved
- 1.8 Benefits
- 1.9 Commercial Applications
- 1.10 Prior Art
- 1.11 Frequently Updated Research
- 1.12 Questions about MEMS Mirror Technology
- 1.13 Original Abstract Submitted
TWO-AXIS MEMS MIRROR
Organization Name
Murata Manufacturing Co., Ltd.
Inventor(s)
TWO-AXIS MEMS MIRROR - A simplified explanation of the abstract
This abstract first appeared for US patent application 18627916 titled 'TWO-AXIS MEMS MIRROR
Simplified Explanation
The MEMS mirror in this patent application has two rotation axes and includes piezoelectric actuators, support beams with moving comb fingers, and static comb fingers forming electrostatic actuators. By separating the static comb fingers on a different device layer, the mirror can achieve maximum tilt displacement and a broader operating range.
- The MEMS mirror has two rotation axes.
- It includes piezoelectric actuators, support beams, moving comb fingers, and static comb fingers.
- The static comb fingers are placed on a different device layer.
- This configuration allows for maximum tilt displacement and a broader operating range.
- Electrostatic comb actuators are used for slow drive, enabling effective operation in quasi-static and static modes.
Key Features and Innovation
- Two rotation axes for the MEMS mirror.
- Piezoelectric actuators and electrostatic actuators for precise control.
- Separation of static comb fingers on a different device layer.
- Maximum tilt displacement and broad operating range.
- Effective operation in quasi-static and static modes.
Potential Applications
The technology can be applied in:
- Laser scanning systems
- Optical communication systems
- Biomedical imaging devices
- Microscopy systems
- Aerospace applications
Problems Solved
- Limited tilt displacement in traditional MEMS mirrors.
- Narrow operating range.
- Ineffective operation in quasi-static and static modes.
Benefits
- Enhanced tilt displacement.
- Broader operating range.
- Improved performance in quasi-static and static modes.
- Precise control and stability.
Commercial Applications
Title: Advanced MEMS Mirror Technology for Precision Optical Systems This technology can be utilized in:
- High-speed laser scanning devices
- Precision optical communication systems
- Medical imaging equipment
- Aerospace navigation systems
- Research and development laboratories
Prior Art
Readers can explore prior art related to MEMS mirror technology, piezoelectric actuators, and electrostatic actuators in the field of micro-electromechanical systems.
Frequently Updated Research
Researchers are constantly improving MEMS mirror technology for various applications, including laser scanning, optical communication, and biomedical imaging.
Questions about MEMS Mirror Technology
What are the potential applications of MEMS mirror technology in the aerospace industry?
MEMS mirror technology can be used in aerospace navigation systems for precise optical control and communication.
How does the separation of static comb fingers on a different device layer improve the performance of the MEMS mirror?
Separating the static comb fingers allows for maximum tilt displacement and a broader operating range, enhancing the overall performance of the MEMS mirror.
Original Abstract Submitted
A MEMS mirror is provided with two rotation axes. The MEMS mirror includes a frame with a reflector and piezoelectric actuators inside, and support beams, with moving comb fingers, which alternate with static comb fingers and form electrostatic actuators. A double device layer allows separating the static comb fingers from the rest of the parts of the MEMS mirror by placing them at a different device layer. The configuration maximizes the tilt displacement and broadens operating range of the MEMS mirror. Additionally, using electrostatic comb actuator for slow drive allows effective operation in quasi-static and static modes.
