KLA Corporation patent applications published on October 10th, 2024

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Patent applications for KLA Corporation on October 10th, 2024

ASYMMETRIC GAS BEARING BUSHING FOR THERMO-PUMP (18420359)

Main Inventor

Anatoly Shchemelinin


SYSTEM AND METHOD TO REDUCE MEASUREMENT ERROR IN INTERFEROMETRY-BASED METROLOGY (18594707)

Main Inventor

Yuchi Chen


PARALLEL SCANNING OVERLAY METROLOGY WITH OPTICAL META-SURFACES (18624444)

Main Inventor

Andrew V. Hill


SYSTEM AND METHOD FOR DETERMINING OVERLAY MEASUREMENT OF A SCANNING TARGET (18372444)

Main Inventor

Itay Gdor


SYSTEM AND METHOD FOR TRACKING REAL-TIME POSITION FOR SCANNING OVERLAY METROLOGY (18372531)

Main Inventor

Itay Gdor

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