18634167. MICROELECTROMECHANICAL COMPONENT simplified abstract (Robert Bosch GmbH)
Contents
MICROELECTROMECHANICAL COMPONENT
Organization Name
Inventor(s)
Jochen Reinmuth of Reutlingen (DE)
Christoph Schelling of Stuttgart (DE)
MICROELECTROMECHANICAL COMPONENT - A simplified explanation of the abstract
This abstract first appeared for US patent application 18634167 titled 'MICROELECTROMECHANICAL COMPONENT
The abstract describes a microelectromechanical component designed to interact with a pressure gradient in a fluid. The component includes a substrate with a through-cavity and a membrane structure spanning the cavity, consisting of a central support structure and two membranes. The second membrane has a conductive membrane electrode layer. The central support structure features a center electrode and a contacting element, with spacer elements mechanically connecting the membranes. The structure is divided into inner, outer, and fastening regions, with the center electrode located in the inner region and the contacting element extending into the fastening region.
- The microelectromechanical component is designed to interact with pressure gradients in fluids.
- It features a membrane structure with a central support structure and two membranes, one of which has a conductive electrode layer.
- The central support structure includes a center electrode and a contacting element, mechanically connected by spacer elements.
- The structure is divided into inner, outer, and fastening regions, with the center electrode in the inner region and the contacting element extending to the fastening region.
Potential Applications: - Pressure sensing in fluid systems - Flow control in microfluidic devices - Biomedical applications for monitoring fluid pressures in the body
Problems Solved: - Accurate measurement and control of pressure differentials in fluid systems - Miniaturization of pressure sensing technology for use in small-scale applications
Benefits: - Enhanced precision in pressure gradient detection - Compact design suitable for integration into various systems - Improved efficiency in fluid flow control applications
Commercial Applications: Title: Microfluidic Pressure Sensor for Biomedical Devices This technology could be utilized in medical devices for monitoring fluid pressures within the body, such as in catheters or implantable sensors. It could also find applications in industrial settings for precise control of fluid flow in microfluidic systems.
Questions about the technology: 1. How does the membrane structure of the microelectromechanical component contribute to its functionality? The membrane structure allows for the detection and interaction with pressure gradients in fluids, enabling accurate measurement and control.
2. What are the potential challenges in integrating this technology into existing fluid systems? Integrating this technology may require customization to fit specific applications and interfaces, which could pose challenges in terms of compatibility and calibration.
Original Abstract Submitted
A microelectromechanical component for interacting with a pressure gradient of a fluid. The microelectromechanical component has a substrate with a through-cavity, and a membrane structure which at least partially spans the through-cavity and has a central support structure and two membranes. A second membrane of the membrane structure has a second electrically conductive membrane electrode layer. The central support structure has a center electrode and a contacting element. The membranes are mechanically connected by spacer elements. The membrane structure has an inner region, an outer region, and a fastening region. The inner region is arranged centrally above the through-cavity. The outer region is arranged between the inner region and the fastening region. The fastening region is fastened to the substrate. The center electrode is arranged entirely within the inner region. The contacting element extends from the center electrode via the outer region into the fastening region.
