Panasonic intellectual property management co., ltd. (20240342911). SUBSTRATE TRANSPORT APPARATUS AND ABNORMALITY DETECTION METHOD simplified abstract
Contents
SUBSTRATE TRANSPORT APPARATUS AND ABNORMALITY DETECTION METHOD
Organization Name
panasonic intellectual property management co., ltd.
Inventor(s)
Takashi Sasashige of OSAKA (JP)
SUBSTRATE TRANSPORT APPARATUS AND ABNORMALITY DETECTION METHOD - A simplified explanation of the abstract
This abstract first appeared for US patent application 20240342911 titled 'SUBSTRATE TRANSPORT APPARATUS AND ABNORMALITY DETECTION METHOD
Simplified Explanation: The disclosed substrate transport apparatus includes a substrate storage portion, a measurement portion with a rotation stage and a sensor to measure the substrate's position, a transport portion to move the substrate, and an abnormality detection unit to detect issues in the transport portion.
- **Key Features and Innovation:**
- Substrate storage for holding substrates. - Measurement portion with a rotation stage and sensor for position tracking. - Transport portion for moving substrates. - Abnormality detection unit to identify issues in the transport process.
Potential Applications: This technology can be used in semiconductor manufacturing, solar panel production, and other industries requiring precise substrate handling.
Problems Solved: The apparatus helps in ensuring accurate placement and movement of substrates, reducing errors and improving overall efficiency in manufacturing processes.
Benefits: - Enhanced accuracy in substrate positioning. - Improved productivity and reduced wastage. - Early detection of transport issues for timely maintenance.
Commercial Applications: The substrate transport apparatus can be utilized in clean room environments for semiconductor fabrication, LCD panel production, and other high-tech manufacturing processes to streamline operations and enhance quality control.
Prior Art: Researchers can explore prior patents related to substrate transport systems, sensor-based positioning technologies, and abnormality detection units in industrial equipment.
Frequently Updated Research: Stay updated on advancements in sensor technology, automation in manufacturing, and quality control systems for substrate handling equipment.
Questions about Substrate Transport Apparatus: 1. What are the primary components of the substrate transport apparatus and their functions? 2. How does the abnormality detection unit work in identifying issues in the transport portion?
Original Abstract Submitted
the disclosed substrate transport apparatus includes a substrate storage portion that stores a substrate, a measurement portion including a rotation stage on which the substrate is to be placed and a sensor that measures the position of the outer edge of the substrate on the rotation stage, a transport portion that takes out a substrate from the substrate storage portion and places the substrate on the rotation stage, and an abnormality detection unit that detects an abnormality in the transport portion. the abnormality detection unit detects an abnormality in the transport portion based on measurement data acquired by the sensor while the rotation stage is rotated in the measurement portion.
