18591209. TEMPERATURE CONTROL SYSTEM, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)
Contents
- 1 TEMPERATURE CONTROL SYSTEM, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
- 1.1 Organization Name
- 1.2 Inventor(s)
- 1.3 TEMPERATURE CONTROL SYSTEM, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM - A simplified explanation of the abstract
- 1.4 Simplified Explanation
- 1.5 Key Features and Innovation
- 1.6 Potential Applications
- 1.7 Problems Solved
- 1.8 Benefits
- 1.9 Commercial Applications
- 1.10 Questions about the Technology
- 1.11 Original Abstract Submitted
TEMPERATURE CONTROL SYSTEM, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
Organization Name
Inventor(s)
Kento Nakanishi of Toyama-shi (JP)
Hideto Yamaguchi of Toyama-shi (JP)
TEMPERATURE CONTROL SYSTEM, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM - A simplified explanation of the abstract
This abstract first appeared for US patent application 18591209 titled 'TEMPERATURE CONTROL SYSTEM, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
Simplified Explanation
The patent application describes a technique involving heaters, temperature sensors, and a controller to control the temperature in different zones.
- Heaters are placed in multiple zones.
- Temperature sensors are used to monitor the temperature of substrates in each zone.
- A controller adjusts the heaters based on the temperature readings from the sensors.
- Each zone has at least one temperature sensor assigned to it.
Key Features and Innovation
- Use of heaters in multiple zones.
- Incorporation of temperature sensors for precise temperature monitoring.
- Controller for automated temperature control.
- Individual temperature sensors assigned to each zone for accurate temperature adjustments.
Potential Applications
This technology can be applied in various industries such as semiconductor manufacturing, food processing, and pharmaceutical production where precise temperature control is crucial.
Problems Solved
- Inefficient temperature control in multiple zones.
- Lack of real-time temperature monitoring.
- Manual adjustment of heaters leading to temperature fluctuations.
Benefits
- Improved temperature control.
- Enhanced product quality.
- Increased efficiency in manufacturing processes.
Commercial Applications
- Semiconductor manufacturing for precise heating of substrates.
- Food processing for accurate temperature control during cooking or baking.
- Pharmaceutical production for maintaining specific temperature requirements during drug manufacturing.
Questions about the Technology
How does this technology improve efficiency in manufacturing processes?
This technology improves efficiency by providing precise temperature control in multiple zones, leading to consistent product quality and reduced wastage.
What industries can benefit the most from this technology?
Industries such as semiconductor manufacturing, food processing, and pharmaceutical production can benefit the most from this technology due to their need for accurate temperature control.
Original Abstract Submitted
There is provided a technique that includes: a heater arranged in each of a plurality of zones; at least one first temperature sensor configured to be capable of operating in conjunction with at least one substrate; another temperature sensor aside from the at least one first temperature sensor; and a controller configured to be capable of controlling the heater based on a temperature detected by either the at least one first temperature sensor or the another temperature sensor, wherein the either the at least one first temperature sensor or the another temperature sensor is assigned to each of the plurality of zones.
