Samsung electronics co., ltd. (20240321557). APPARATUS FOR AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract
Contents
APPARATUS FOR AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Organization Name
Inventor(s)
In Cheol Cheol Song of Hwaseong-si (KR)
Jaebeom Park of Yongin-si (KR)
Byungho Chun of Seongnam-si (KR)
APPARATUS FOR AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE - A simplified explanation of the abstract
This abstract first appeared for US patent application 20240321557 titled 'APPARATUS FOR AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
The patent application describes an apparatus for manufacturing a semiconductor device, which includes a chamber with a lower housing and an upper housing, heater chucks, shower heads, power supplies, power straps, and shielding members to prevent electromagnetic interference.
- The apparatus includes heater chucks in the lower housing, shower heads on the heater chucks, and power supplies connected to the shower heads to provide radio-frequency powers.
- Power straps in the upper housing connect the shower heads to the power supplies, while shielding members enclose the power straps and the shower heads to prevent electromagnetic interference.
- The shielding members effectively prevent interference of the radio-frequency powers between the power straps and the shower heads, ensuring the proper functioning of the semiconductor device manufacturing process.
Potential Applications: - Semiconductor manufacturing industry - Electronics industry - Research and development facilities
Problems Solved: - Electromagnetic interference in semiconductor device manufacturing - Ensuring the efficiency and accuracy of the manufacturing process
Benefits: - Improved quality and reliability of semiconductor devices - Enhanced efficiency in manufacturing processes - Reduction of electromagnetic interference issues
Commercial Applications: - Semiconductor manufacturing equipment suppliers - Electronics manufacturing companies - Research institutions focusing on semiconductor technology
Questions about the technology: 1. How does the apparatus prevent electromagnetic interference in the semiconductor manufacturing process? 2. What are the key components of the apparatus and how do they work together to ensure the efficiency of the manufacturing process?
Original Abstract Submitted
an apparatus for manufacturing a semiconductor device includes a chamber including a lower housing and an upper housing, heater chucks in the lower housing, shower heads on the heater chucks, the shower heads being between the lower housing and the upper housing, power supplies connected to the shower heads to provide radio-frequency powers to the shower heads, power straps in the upper housing to connect the shower heads to the power supplies, and shielding members in the upper housing, the shielding members enclosing the power straps and the shower heads, respectively, the shielding members to prevent electromagnetic interference of the radio-frequency powers between the power straps and between the shower heads.
