Applied materials, inc. (20240302812). FABRICATION TOOL CALIBRATION simplified abstract
Contents
FABRICATION TOOL CALIBRATION
Organization Name
Inventor(s)
Gautham Bammanahalli of Newark CA (US)
Nathaniel Moore of San Jose CA (US)
FABRICATION TOOL CALIBRATION - A simplified explanation of the abstract
This abstract first appeared for US patent application 20240302812 titled 'FABRICATION TOOL CALIBRATION
The patent application describes a method for calibrating a fabrication system by selecting a calibration recipe from multiple recipes based on process relationships between process parameters.
- The method involves receiving characterization data for multiple recipes and substrates, determining process parameters, and selecting a calibration recipe based on process relationships.
- A threshold variation for the process relationship is determined to ensure accurate calibration of the fabrication system.
- The calibration recipe and threshold variation are provided to calibrate the fabrication system effectively.
Potential Applications: - Semiconductor manufacturing - Printed circuit board fabrication - Thin film deposition processes
Problems Solved: - Ensures accurate calibration of fabrication systems - Improves process control and consistency - Reduces scrap and rework in manufacturing processes
Benefits: - Enhanced product quality - Increased production efficiency - Cost savings through optimized processes
Commercial Applications: Title: "Advanced Fabrication System Calibration Method" This technology can be applied in industries such as semiconductor manufacturing, electronics production, and precision engineering. It offers a competitive advantage by improving process control and product quality, leading to increased customer satisfaction and cost savings.
Questions about the technology: 1. How does this calibration method compare to traditional calibration techniques? 2. What are the potential cost savings associated with implementing this calibration method?
Frequently Updated Research: Researchers are continuously exploring new materials and processes in fabrication systems, which may require ongoing calibration and optimization using advanced methods like the one described in this patent application. Stay updated on industry advancements to leverage the latest calibration technologies for improved manufacturing outcomes.
Original Abstract Submitted
a method for calibrating a fabrication system including selecting, from multiple recipes, a calibration recipe including a first process parameter for performing a fabrication process on a substrate, including: for each recipe and for two or more substrates, characterization data representative of the fabrication process performed on the two or more substrates using the recipe is received. a second process parameter is determined from the first and second states of the substrates, and a process relationship is determined between the first process parameter and the second process parameter for the recipe. the calibration recipe is selected from the multiple recipes based on the respective process relationships, a threshold variation for the process relationship is determined between the first and the second process parameter; and the calibration recipe and the threshold variation are provided for calibrating the fabrication system.
