Applied materials, inc. (20240282556). FAST RESPONSE PEDESTAL ASSEMBLY FOR SELECTIVE PRECLEAN simplified abstract

FAST RESPONSE PEDESTAL ASSEMBLY FOR SELECTIVE PRECLEAN

Organization Name

applied materials, inc.

Inventor(s)

Lara Hawrylchak of Gilroy CA (US)

Chaitanya A. Prasad of Cupertino CA (US)

FAST RESPONSE PEDESTAL ASSEMBLY FOR SELECTIVE PRECLEAN - A simplified explanation of the abstract

This abstract first appeared for US patent application 20240282556 titled 'FAST RESPONSE PEDESTAL ASSEMBLY FOR SELECTIVE PRECLEAN

The patent application relates to an improved substrate support pedestal assembly, which includes a shaft and a substrate support pedestal mechanically coupled to the shaft. The substrate support pedestal is coated with a ceramic material on its top surface.

• The assembly includes a shaft for support.
• The substrate support pedestal is mechanically connected to the shaft.
• The top surface of the substrate support pedestal is coated with a ceramic material.

Potential Applications: This technology can be used in semiconductor manufacturing processes where precise substrate support is required.

Problems Solved: The technology addresses the need for stable and durable substrate support in manufacturing processes.

Benefits: The ceramic coating provides enhanced durability and stability to the substrate support pedestal assembly.

Commercial Applications: This technology can be utilized in the semiconductor industry for manufacturing processes requiring precise substrate support.

Prior Art: Readers can explore prior patents related to substrate support pedestal assemblies in the semiconductor industry.

Frequently Updated Research: Stay updated on the latest advancements in substrate support pedestal technology for semiconductor manufacturing processes.

Questions about Substrate Support Pedestal Assembly: 1. How does the ceramic coating on the substrate support pedestal improve its performance?

  - The ceramic coating enhances durability and stability, crucial for semiconductor manufacturing processes.

2. What are the potential cost implications of implementing this technology in manufacturing processes?

  - The cost implications may vary depending on the scale of production and specific requirements of the manufacturing process.

Original Abstract Submitted

implementations of the present disclosure generally relate to an improved substrate support pedestal assembly. in one implementation, the substrate support pedestal assembly includes a shaft. the substrate support pedestal assembly further includes a substrate support pedestal, mechanically coupled to the shaft. the substrate support pedestal comprises substrate support plate coated on a top surface with a ceramic material.