18594011. METHOD OF FORMING ELECTRICAL FUSE MATRIX simplified abstract (NANYA TECHNOLOGY CORPORATION)
Contents
METHOD OF FORMING ELECTRICAL FUSE MATRIX
Organization Name
Inventor(s)
Hsih-Yang Chiu of New Taipei City (TW)
METHOD OF FORMING ELECTRICAL FUSE MATRIX - A simplified explanation of the abstract
This abstract first appeared for US patent application 18594011 titled 'METHOD OF FORMING ELECTRICAL FUSE MATRIX
The method described in the abstract involves forming an electrical fuse matrix using various steps such as seed layer deposition, poly-silicon cylinder formation, spacer creation, trench formation, anti-fuse structure formation, and top metal plate deposition.
- Seed layer is deposited on bottom metal plates.
- Poly-silicon cylinders are formed on the seed layer.
- Spacer is created around the poly-silicon cylinders and seed layer.
- Hourglass-shaped trenches are formed between the poly-silicon cylinders by removing part of the spacer.
- Anti-fuse structures are created in the hourglass-shaped trenches.
- Top metal plates are deposited on the anti-fuse structures.
Potential Applications: - Semiconductor manufacturing - Integrated circuit fabrication - Electronics industry
Problems Solved: - Efficient formation of electrical fuse matrix - Precise anti-fuse structure creation - Improved reliability in electronic devices
Benefits: - Enhanced performance of electronic components - Increased durability of electrical fuse matrix - Cost-effective manufacturing process
Commercial Applications: Title: Advanced Semiconductor Manufacturing Process for Electrical Fuse Matrix This technology can be utilized in the semiconductor industry for the production of high-quality integrated circuits with reliable electrical fuse matrices. The market implications include improved product quality, increased efficiency in manufacturing processes, and a competitive edge in the electronics market.
Questions about the technology: 1. How does the formation of anti-fuse structures contribute to the functionality of the electrical fuse matrix? 2. What are the advantages of using poly-silicon cylinders in the manufacturing process of the electrical fuse matrix?
Original Abstract Submitted
A method of forming the electrical fuse matrix includes forming a seed layer on a plurality of bottom metal plates extending in a first direction; forming a plurality of poly-silicon cylinders on the seed layer; forming a spacer surrounding the plurality of poly-silicon cylinders and covering the seed layer; forming a plurality of hourglass-shaped trenches between the poly-silicon cylinders by removing a portion of the spacer; forming a plurality of anti-fuse structures in the hourglass-shaped trenches; and forming a plurality of top metal plates on the anti-fuse structures.
