Fuping Chen

Executive Summary

Fuping Chen is an inventor who has filed 2 patents. Their primary areas of innovation include using mechanical means, e.g. chucks, clamps or pinches {(using elecrostatic chucks (1 patents), Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components {; Apparatus not specifically provided for elsewhere (processes per se (1 patents), {Apparatus for applying a liquid, a resin, an ink or the like ( (1 patents), and they have worked with companies such as ACM RESEARCH (SHANGHAI), INC. (2 patents). Their most frequent collaborators include (2 collaborations), (2 collaborations), (1 collaborations).

Patent Filing Activity

Technology Areas

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List of Technology Areas

• H01L21/68764 (using mechanical means, e.g. chucks, clamps or pinches {(using elecrostatic chucks): 1 patents
• H01L21/6708 (Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components {; Apparatus not specifically provided for elsewhere (processes per se): 1 patents
• H01L21/6715 ({Apparatus for applying a liquid, a resin, an ink or the like (): 1 patents
• H01L21/68735 (using mechanical means, e.g. chucks, clamps or pinches {(using elecrostatic chucks): 1 patents
• H01L21/68742 (using mechanical means, e.g. chucks, clamps or pinches {(using elecrostatic chucks): 1 patents
• B01D19/0036 ({Flash degasification (the other groups take precedence)}): 1 patents
• B01D19/00 (Degasification of liquids): 1 patents
• B01D19/0031 (Degasification of liquids): 1 patents
• B08B3/041 ({Cleaning travelling work}): 1 patents
• B08B3/08 (the liquid having chemical or dissolving effect (substances used, see the relevant classes)): 1 patents
• B08B3/10 (with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration): 1 patents
• B08B3/12 (by sonic or ultrasonic vibrations (washing or rinsing machines for crockery or tableware using sonic or ultrasonic waves): 1 patents
• B08B7/04 (CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL (brushes): 1 patents
• F04B15/04 (POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS (machines for liquids, or pumps, of rotary-piston or oscillating-piston type): 1 patents
• F04B23/00 (Pumping installations or systems (pumps characterised by combination with, or adaptation to, specific driving engines or motors): 1 patents
• H01L21/02052 ({Wet cleaning only (): 1 patents
• H01L21/02057 ({Cleaning during device manufacture}): 1 patents
• H01L21/67017 ({Apparatus for fluid treatment (): 1 patents
• H01L21/67051 (Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components {; Apparatus not specifically provided for elsewhere (processes per se): 1 patents
• H01L21/67092 ({Apparatus for mechanical treatment (or grinding or cutting, see the relevant groups in subclasses): 1 patents
• H01L21/67253 (Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components {; Apparatus not specifically provided for elsewhere (processes per se): 1 patents
• B08B2203/007 (CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL (brushes): 1 patents
• F04B23/04 (POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS (machines for liquids, or pumps, of rotary-piston or oscillating-piston type): 1 patents

Companies

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List of Companies

• ACM RESEARCH (SHANGHAI), INC.: 2 patents

Collaborators

• Hui Wang (2 collaborations)
• Shena Jia (2 collaborations)
• Feng Liu (1 collaborations)
• Xiaofeng Tao (1 collaborations)
• Haibo Hu (1 collaborations)
• Yang Liu (1 collaborations)
• Xi Wang (1 collaborations)
• Danying Wang (1 collaborations)
• Chaowei Jiang (1 collaborations)
• Yingwei Dai (1 collaborations)
• Jian Wang (1 collaborations)