US Patent Application 18366151. PIEZOELECTRIC ANTI-STICTION STRUCTURE FOR MICROELECTROMECHANICAL SYSTEMS simplified abstract

PIEZOELECTRIC ANTI-STICTION STRUCTURE FOR MICROELECTROMECHANICAL SYSTEMS

Organization Name

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

Inventor(s)

Fan Hu of Taipei City (TW)

Chun-Ren Cheng of Hsin-Chu City (TW)

Hsiang-Fu Chen of Zhubei City (TW)

Wen-Chuan Tai of Hsinchu City (TW)

PIEZOELECTRIC ANTI-STICTION STRUCTURE FOR MICROELECTROMECHANICAL SYSTEMS - A simplified explanation of the abstract

This abstract first appeared for US patent application 18366151 titled 'PIEZOELECTRIC ANTI-STICTION STRUCTURE FOR MICROELECTROMECHANICAL SYSTEMS

Simplified Explanation

The patent application is for a microelectromechanical system (MEMS) device.

• The device includes a structure made of a material that does not conduct electricity, called a dielectric structure, which is placed over a semiconductor substrate.
• The dielectric structure creates a cavity, or empty space, within the device.
• Another semiconductor substrate is placed over the dielectric structure and contains a movable mass.
• The movable mass has sidewalls that are positioned between the sidewalls of the cavity.
• To prevent the movable mass from sticking to the dielectric structure, a structure made of a material called piezoelectric material is placed between them.
• The piezoelectric anti-stiction structure includes a piezoelectric structure and an electrode, which is a conductor of electricity, placed between the piezoelectric structure and the dielectric structure.

Original Abstract Submitted

Various embodiments of the present disclosure are directed towards a microelectromechanical system (MEMS) device. The MEMS device includes a first dielectric structure disposed over a first semiconductor substrate, where the first dielectric structure at least partially defines a cavity. A second semiconductor substrate is disposed over the first dielectric structure and includes a movable mass, where opposite sidewalls of the movable mass are disposed between opposite sidewall of the cavity. A first piezoelectric anti-stiction structure is disposed between the movable mass and the first dielectric structure, wherein the first piezoelectric anti-stiction structure includes a first piezoelectric structure and a first electrode disposed between the first piezoelectric structure and the first dielectric structure