The following categories exist on the wiki, and may or may not be unused. Also see wanted categories.

• G03F1/38 (42 members)
• G03F1/40 (3 members)
• G03F1/42 (60 members)
• G03F1/44 (27 members)
• G03F1/46 (13 members)
• G03F1/48 (23 members)
• G03F1/50 (1 member)
• G03F1/52 (13 members)
• G03F1/54 (47 members)
• G03F1/56 (5 members)
• G03F1/58 (16 members)
• G03F1/60 (11 members)
• G03F1/62 (43 members)
• G03F1/64 (58 members)
• G03F1/66 (17 members)
• G03F1/68 (1 member)
• G03F1/70 (83 members)
• G03F1/72 (30 members)
• G03F1/74 (10 members)
• G03F1/76 (18 members)
• G03F1/78 (14 members)
• G03F1/80 (50 members)
• G03F1/82 (38 members)
• G03F1/84 (50 members)
• G03F1/86 (4 members)
• G03F7/00 (1,066 members)
• G03F7/004 (419 members)
• G03F7/012 (1 member)
• G03F7/016 (5 members)
• G03F7/021 (6 members)
• G03F7/025 (1 member)
• G03F7/027 (31 members)
• G03F7/028 (8 members)
• G03F7/029 (27 members)
• G03F7/031 (27 members)
• G03F7/032 (1 member)
• G03F7/033 (3 members)
• G03F7/037 (1 member)
• G03F7/038 (183 members)
• G03F7/039 (193 members)
• G03F7/06 (2 members)
• G03F7/075 (38 members)
• G03F7/09 (94 members)
• G03F7/095 (6 members)
• G03F7/105 (33 members)
• G03F7/11 (121 members)
• G03F7/115 (1 member)
• G03F7/16 (284 members)
• G03F7/20 (465 members)
• G03F7/22 (2 members)