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Bibliographic details for 18279694. OPERATING A METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF simplified abstract (ASML NETHERLANDS B.V.)

Citation styles for 18279694. OPERATING A METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF simplified abstract (ASML NETHERLANDS B.V.)

APA style

18279694. OPERATING A METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF simplified abstract (ASML NETHERLANDS B.V.). (2024, July 15). WikiPatents, . Retrieved 13:33, September 15, 2024 from http://wikipatents.org/index.php?title=18279694._OPERATING_A_METROLOGY_SYSTEM,_LITHOGRAPHIC_APPARATUS,_AND_METHODS_THEREOF_simplified_abstract_(ASML_NETHERLANDS_B.V.)&oldid=99666.

MLA style

"18279694. OPERATING A METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF simplified abstract (ASML NETHERLANDS B.V.)." WikiPatents, . 15 Jul 2024, 13:54 UTC. 15 Sep 2024, 13:33 <http://wikipatents.org/index.php?title=18279694._OPERATING_A_METROLOGY_SYSTEM,_LITHOGRAPHIC_APPARATUS,_AND_METHODS_THEREOF_simplified_abstract_(ASML_NETHERLANDS_B.V.)&oldid=99666>.

MHRA style

WikiPatents contributors, '18279694. OPERATING A METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF simplified abstract (ASML NETHERLANDS B.V.)', WikiPatents, , 15 July 2024, 13:54 UTC, <http://wikipatents.org/index.php?title=18279694._OPERATING_A_METROLOGY_SYSTEM,_LITHOGRAPHIC_APPARATUS,_AND_METHODS_THEREOF_simplified_abstract_(ASML_NETHERLANDS_B.V.)&oldid=99666> [accessed 15 September 2024]

Chicago style

WikiPatents contributors, "18279694. OPERATING A METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF simplified abstract (ASML NETHERLANDS B.V.)," WikiPatents, , http://wikipatents.org/index.php?title=18279694._OPERATING_A_METROLOGY_SYSTEM,_LITHOGRAPHIC_APPARATUS,_AND_METHODS_THEREOF_simplified_abstract_(ASML_NETHERLANDS_B.V.)&oldid=99666 (accessed September 15, 2024).

CBE/CSE style

WikiPatents contributors. 18279694. OPERATING A METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF simplified abstract (ASML NETHERLANDS B.V.) [Internet]. WikiPatents, ; 2024 Jul 15, 13:54 UTC [cited 2024 Sep 15]. Available from: http://wikipatents.org/index.php?title=18279694._OPERATING_A_METROLOGY_SYSTEM,_LITHOGRAPHIC_APPARATUS,_AND_METHODS_THEREOF_simplified_abstract_(ASML_NETHERLANDS_B.V.)&oldid=99666.

Bluebook style

18279694. OPERATING A METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF simplified abstract (ASML NETHERLANDS B.V.), http://wikipatents.org/index.php?title=18279694._OPERATING_A_METROLOGY_SYSTEM,_LITHOGRAPHIC_APPARATUS,_AND_METHODS_THEREOF_simplified_abstract_(ASML_NETHERLANDS_B.V.)&oldid=99666 (last visited September 15, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18279694. OPERATING A METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF simplified abstract (ASML NETHERLANDS B.V.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18279694._OPERATING_A_METROLOGY_SYSTEM,_LITHOGRAPHIC_APPARATUS,_AND_METHODS_THEREOF_simplified_abstract_(ASML_NETHERLANDS_B.V.)&oldid=99666",
   note = "[Online; accessed 15-September-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18279694. OPERATING A METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF simplified abstract (ASML NETHERLANDS B.V.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18279694._OPERATING_A_METROLOGY_SYSTEM,_LITHOGRAPHIC_APPARATUS,_AND_METHODS_THEREOF_simplified_abstract_(ASML_NETHERLANDS_B.V.)&oldid=99666}",
   note = "[Online; accessed 15-September-2024]"
 }


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