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Bibliographic details for 17972958. Method for OES Data Collection and Endpoint Detection simplified abstract (Tokyo Electron Limited)
- Page name: 17972958. Method for OES Data Collection and Endpoint Detection simplified abstract (Tokyo Electron Limited)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 12 July 2024 07:17 UTC
- Date retrieved: 16 September 2024 05:24 UTC
- Permanent URL: http://wikipatents.org/index.php?title=17972958._Method_for_OES_Data_Collection_and_Endpoint_Detection_simplified_abstract_(Tokyo_Electron_Limited)&oldid=95410
- Page Version ID: 95410
Citation styles for 17972958. Method for OES Data Collection and Endpoint Detection simplified abstract (Tokyo Electron Limited)
APA style
17972958. Method for OES Data Collection and Endpoint Detection simplified abstract (Tokyo Electron Limited). (2024, July 12). WikiPatents, . Retrieved 05:24, September 16, 2024 from http://wikipatents.org/index.php?title=17972958._Method_for_OES_Data_Collection_and_Endpoint_Detection_simplified_abstract_(Tokyo_Electron_Limited)&oldid=95410.
MLA style
"17972958. Method for OES Data Collection and Endpoint Detection simplified abstract (Tokyo Electron Limited)." WikiPatents, . 12 Jul 2024, 07:17 UTC. 16 Sep 2024, 05:24 <http://wikipatents.org/index.php?title=17972958._Method_for_OES_Data_Collection_and_Endpoint_Detection_simplified_abstract_(Tokyo_Electron_Limited)&oldid=95410>.
MHRA style
WikiPatents contributors, '17972958. Method for OES Data Collection and Endpoint Detection simplified abstract (Tokyo Electron Limited)', WikiPatents, , 12 July 2024, 07:17 UTC, <http://wikipatents.org/index.php?title=17972958._Method_for_OES_Data_Collection_and_Endpoint_Detection_simplified_abstract_(Tokyo_Electron_Limited)&oldid=95410> [accessed 16 September 2024]
Chicago style
WikiPatents contributors, "17972958. Method for OES Data Collection and Endpoint Detection simplified abstract (Tokyo Electron Limited)," WikiPatents, , http://wikipatents.org/index.php?title=17972958._Method_for_OES_Data_Collection_and_Endpoint_Detection_simplified_abstract_(Tokyo_Electron_Limited)&oldid=95410 (accessed September 16, 2024).
CBE/CSE style
WikiPatents contributors. 17972958. Method for OES Data Collection and Endpoint Detection simplified abstract (Tokyo Electron Limited) [Internet]. WikiPatents, ; 2024 Jul 12, 07:17 UTC [cited 2024 Sep 16]. Available from: http://wikipatents.org/index.php?title=17972958._Method_for_OES_Data_Collection_and_Endpoint_Detection_simplified_abstract_(Tokyo_Electron_Limited)&oldid=95410.
Bluebook style
17972958. Method for OES Data Collection and Endpoint Detection simplified abstract (Tokyo Electron Limited), http://wikipatents.org/index.php?title=17972958._Method_for_OES_Data_Collection_and_Endpoint_Detection_simplified_abstract_(Tokyo_Electron_Limited)&oldid=95410 (last visited September 16, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "17972958. Method for OES Data Collection and Endpoint Detection simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=17972958._Method_for_OES_Data_Collection_and_Endpoint_Detection_simplified_abstract_(Tokyo_Electron_Limited)&oldid=95410",
note = "[Online; accessed 16-September-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "17972958. Method for OES Data Collection and Endpoint Detection simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=17972958._Method_for_OES_Data_Collection_and_Endpoint_Detection_simplified_abstract_(Tokyo_Electron_Limited)&oldid=95410}",
note = "[Online; accessed 16-September-2024]"
}
