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Bibliographic details for 18398162. PLASMA PROCESSING SYSTEM AND EDGE RING REPLACEMENT METHOD simplified abstract (Tokyo Electron Limited)
- Page name: 18398162. PLASMA PROCESSING SYSTEM AND EDGE RING REPLACEMENT METHOD simplified abstract (Tokyo Electron Limited)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 12 July 2024 07:17 UTC
- Date retrieved: 16 September 2024 05:09 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18398162._PLASMA_PROCESSING_SYSTEM_AND_EDGE_RING_REPLACEMENT_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=95408
- Page Version ID: 95408
Citation styles for 18398162. PLASMA PROCESSING SYSTEM AND EDGE RING REPLACEMENT METHOD simplified abstract (Tokyo Electron Limited)
APA style
18398162. PLASMA PROCESSING SYSTEM AND EDGE RING REPLACEMENT METHOD simplified abstract (Tokyo Electron Limited). (2024, July 12). WikiPatents, . Retrieved 05:09, September 16, 2024 from http://wikipatents.org/index.php?title=18398162._PLASMA_PROCESSING_SYSTEM_AND_EDGE_RING_REPLACEMENT_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=95408.
MLA style
"18398162. PLASMA PROCESSING SYSTEM AND EDGE RING REPLACEMENT METHOD simplified abstract (Tokyo Electron Limited)." WikiPatents, . 12 Jul 2024, 07:17 UTC. 16 Sep 2024, 05:09 <http://wikipatents.org/index.php?title=18398162._PLASMA_PROCESSING_SYSTEM_AND_EDGE_RING_REPLACEMENT_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=95408>.
MHRA style
WikiPatents contributors, '18398162. PLASMA PROCESSING SYSTEM AND EDGE RING REPLACEMENT METHOD simplified abstract (Tokyo Electron Limited)', WikiPatents, , 12 July 2024, 07:17 UTC, <http://wikipatents.org/index.php?title=18398162._PLASMA_PROCESSING_SYSTEM_AND_EDGE_RING_REPLACEMENT_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=95408> [accessed 16 September 2024]
Chicago style
WikiPatents contributors, "18398162. PLASMA PROCESSING SYSTEM AND EDGE RING REPLACEMENT METHOD simplified abstract (Tokyo Electron Limited)," WikiPatents, , http://wikipatents.org/index.php?title=18398162._PLASMA_PROCESSING_SYSTEM_AND_EDGE_RING_REPLACEMENT_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=95408 (accessed September 16, 2024).
CBE/CSE style
WikiPatents contributors. 18398162. PLASMA PROCESSING SYSTEM AND EDGE RING REPLACEMENT METHOD simplified abstract (Tokyo Electron Limited) [Internet]. WikiPatents, ; 2024 Jul 12, 07:17 UTC [cited 2024 Sep 16]. Available from: http://wikipatents.org/index.php?title=18398162._PLASMA_PROCESSING_SYSTEM_AND_EDGE_RING_REPLACEMENT_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=95408.
Bluebook style
18398162. PLASMA PROCESSING SYSTEM AND EDGE RING REPLACEMENT METHOD simplified abstract (Tokyo Electron Limited), http://wikipatents.org/index.php?title=18398162._PLASMA_PROCESSING_SYSTEM_AND_EDGE_RING_REPLACEMENT_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=95408 (last visited September 16, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18398162. PLASMA PROCESSING SYSTEM AND EDGE RING REPLACEMENT METHOD simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18398162._PLASMA_PROCESSING_SYSTEM_AND_EDGE_RING_REPLACEMENT_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=95408",
note = "[Online; accessed 16-September-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18398162. PLASMA PROCESSING SYSTEM AND EDGE RING REPLACEMENT METHOD simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18398162._PLASMA_PROCESSING_SYSTEM_AND_EDGE_RING_REPLACEMENT_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=95408}",
note = "[Online; accessed 16-September-2024]"
}
