Cite This Page
Bibliographic details for 17971394. RESONANT ANTENNA FOR PHYSICAL VAPOR DEPOSITION APPLICATIONS simplified abstract (Tokyo Electron Limited)
- Page name: 17971394. RESONANT ANTENNA FOR PHYSICAL VAPOR DEPOSITION APPLICATIONS simplified abstract (Tokyo Electron Limited)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 12 July 2024 07:17 UTC
- Date retrieved: 16 September 2024 05:22 UTC
- Permanent URL: http://wikipatents.org/index.php?title=17971394._RESONANT_ANTENNA_FOR_PHYSICAL_VAPOR_DEPOSITION_APPLICATIONS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=95404
- Page Version ID: 95404
Citation styles for 17971394. RESONANT ANTENNA FOR PHYSICAL VAPOR DEPOSITION APPLICATIONS simplified abstract (Tokyo Electron Limited)
APA style
17971394. RESONANT ANTENNA FOR PHYSICAL VAPOR DEPOSITION APPLICATIONS simplified abstract (Tokyo Electron Limited). (2024, July 12). WikiPatents, . Retrieved 05:22, September 16, 2024 from http://wikipatents.org/index.php?title=17971394._RESONANT_ANTENNA_FOR_PHYSICAL_VAPOR_DEPOSITION_APPLICATIONS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=95404.
MLA style
"17971394. RESONANT ANTENNA FOR PHYSICAL VAPOR DEPOSITION APPLICATIONS simplified abstract (Tokyo Electron Limited)." WikiPatents, . 12 Jul 2024, 07:17 UTC. 16 Sep 2024, 05:22 <http://wikipatents.org/index.php?title=17971394._RESONANT_ANTENNA_FOR_PHYSICAL_VAPOR_DEPOSITION_APPLICATIONS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=95404>.
MHRA style
WikiPatents contributors, '17971394. RESONANT ANTENNA FOR PHYSICAL VAPOR DEPOSITION APPLICATIONS simplified abstract (Tokyo Electron Limited)', WikiPatents, , 12 July 2024, 07:17 UTC, <http://wikipatents.org/index.php?title=17971394._RESONANT_ANTENNA_FOR_PHYSICAL_VAPOR_DEPOSITION_APPLICATIONS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=95404> [accessed 16 September 2024]
Chicago style
WikiPatents contributors, "17971394. RESONANT ANTENNA FOR PHYSICAL VAPOR DEPOSITION APPLICATIONS simplified abstract (Tokyo Electron Limited)," WikiPatents, , http://wikipatents.org/index.php?title=17971394._RESONANT_ANTENNA_FOR_PHYSICAL_VAPOR_DEPOSITION_APPLICATIONS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=95404 (accessed September 16, 2024).
CBE/CSE style
WikiPatents contributors. 17971394. RESONANT ANTENNA FOR PHYSICAL VAPOR DEPOSITION APPLICATIONS simplified abstract (Tokyo Electron Limited) [Internet]. WikiPatents, ; 2024 Jul 12, 07:17 UTC [cited 2024 Sep 16]. Available from: http://wikipatents.org/index.php?title=17971394._RESONANT_ANTENNA_FOR_PHYSICAL_VAPOR_DEPOSITION_APPLICATIONS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=95404.
Bluebook style
17971394. RESONANT ANTENNA FOR PHYSICAL VAPOR DEPOSITION APPLICATIONS simplified abstract (Tokyo Electron Limited), http://wikipatents.org/index.php?title=17971394._RESONANT_ANTENNA_FOR_PHYSICAL_VAPOR_DEPOSITION_APPLICATIONS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=95404 (last visited September 16, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "17971394. RESONANT ANTENNA FOR PHYSICAL VAPOR DEPOSITION APPLICATIONS simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=17971394._RESONANT_ANTENNA_FOR_PHYSICAL_VAPOR_DEPOSITION_APPLICATIONS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=95404",
note = "[Online; accessed 16-September-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "17971394. RESONANT ANTENNA FOR PHYSICAL VAPOR DEPOSITION APPLICATIONS simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=17971394._RESONANT_ANTENNA_FOR_PHYSICAL_VAPOR_DEPOSITION_APPLICATIONS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=95404}",
note = "[Online; accessed 16-September-2024]"
}
