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Citation styles for 18611440. DROPLET SPLASH CONTROL FOR EXTREME ULTRAVIOLET PHOTOLITHOGRAPHY simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)

APA style

18611440. DROPLET SPLASH CONTROL FOR EXTREME ULTRAVIOLET PHOTOLITHOGRAPHY simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.). (2024, July 12). WikiPatents, . Retrieved 14:01, September 15, 2024 from http://wikipatents.org/index.php?title=18611440._DROPLET_SPLASH_CONTROL_FOR_EXTREME_ULTRAVIOLET_PHOTOLITHOGRAPHY_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=93905.

MLA style

"18611440. DROPLET SPLASH CONTROL FOR EXTREME ULTRAVIOLET PHOTOLITHOGRAPHY simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)." WikiPatents, . 12 Jul 2024, 04:50 UTC. 15 Sep 2024, 14:01 <http://wikipatents.org/index.php?title=18611440._DROPLET_SPLASH_CONTROL_FOR_EXTREME_ULTRAVIOLET_PHOTOLITHOGRAPHY_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=93905>.

MHRA style

WikiPatents contributors, '18611440. DROPLET SPLASH CONTROL FOR EXTREME ULTRAVIOLET PHOTOLITHOGRAPHY simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)', WikiPatents, , 12 July 2024, 04:50 UTC, <http://wikipatents.org/index.php?title=18611440._DROPLET_SPLASH_CONTROL_FOR_EXTREME_ULTRAVIOLET_PHOTOLITHOGRAPHY_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=93905> [accessed 15 September 2024]

Chicago style

WikiPatents contributors, "18611440. DROPLET SPLASH CONTROL FOR EXTREME ULTRAVIOLET PHOTOLITHOGRAPHY simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=18611440._DROPLET_SPLASH_CONTROL_FOR_EXTREME_ULTRAVIOLET_PHOTOLITHOGRAPHY_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=93905 (accessed September 15, 2024).

CBE/CSE style

WikiPatents contributors. 18611440. DROPLET SPLASH CONTROL FOR EXTREME ULTRAVIOLET PHOTOLITHOGRAPHY simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) [Internet]. WikiPatents, ; 2024 Jul 12, 04:50 UTC [cited 2024 Sep 15]. Available from: http://wikipatents.org/index.php?title=18611440._DROPLET_SPLASH_CONTROL_FOR_EXTREME_ULTRAVIOLET_PHOTOLITHOGRAPHY_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=93905.

Bluebook style

18611440. DROPLET SPLASH CONTROL FOR EXTREME ULTRAVIOLET PHOTOLITHOGRAPHY simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.), http://wikipatents.org/index.php?title=18611440._DROPLET_SPLASH_CONTROL_FOR_EXTREME_ULTRAVIOLET_PHOTOLITHOGRAPHY_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=93905 (last visited September 15, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18611440. DROPLET SPLASH CONTROL FOR EXTREME ULTRAVIOLET PHOTOLITHOGRAPHY simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18611440._DROPLET_SPLASH_CONTROL_FOR_EXTREME_ULTRAVIOLET_PHOTOLITHOGRAPHY_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=93905",
   note = "[Online; accessed 15-September-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18611440. DROPLET SPLASH CONTROL FOR EXTREME ULTRAVIOLET PHOTOLITHOGRAPHY simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18611440._DROPLET_SPLASH_CONTROL_FOR_EXTREME_ULTRAVIOLET_PHOTOLITHOGRAPHY_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=93905}",
   note = "[Online; accessed 15-September-2024]"
 }