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Bibliographic details for 18609433. IMMERSION EXPOSURE TOOL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)
- Page name: 18609433. IMMERSION EXPOSURE TOOL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 12 July 2024 04:50 UTC
- Date retrieved: 15 September 2024 14:11 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18609433._IMMERSION_EXPOSURE_TOOL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=93904
- Page Version ID: 93904
Citation styles for 18609433. IMMERSION EXPOSURE TOOL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)
APA style
18609433. IMMERSION EXPOSURE TOOL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.). (2024, July 12). WikiPatents, . Retrieved 14:11, September 15, 2024 from http://wikipatents.org/index.php?title=18609433._IMMERSION_EXPOSURE_TOOL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=93904.
MLA style
"18609433. IMMERSION EXPOSURE TOOL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)." WikiPatents, . 12 Jul 2024, 04:50 UTC. 15 Sep 2024, 14:11 <http://wikipatents.org/index.php?title=18609433._IMMERSION_EXPOSURE_TOOL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=93904>.
MHRA style
WikiPatents contributors, '18609433. IMMERSION EXPOSURE TOOL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)', WikiPatents, , 12 July 2024, 04:50 UTC, <http://wikipatents.org/index.php?title=18609433._IMMERSION_EXPOSURE_TOOL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=93904> [accessed 15 September 2024]
Chicago style
WikiPatents contributors, "18609433. IMMERSION EXPOSURE TOOL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=18609433._IMMERSION_EXPOSURE_TOOL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=93904 (accessed September 15, 2024).
CBE/CSE style
WikiPatents contributors. 18609433. IMMERSION EXPOSURE TOOL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) [Internet]. WikiPatents, ; 2024 Jul 12, 04:50 UTC [cited 2024 Sep 15]. Available from: http://wikipatents.org/index.php?title=18609433._IMMERSION_EXPOSURE_TOOL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=93904.
Bluebook style
18609433. IMMERSION EXPOSURE TOOL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.), http://wikipatents.org/index.php?title=18609433._IMMERSION_EXPOSURE_TOOL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=93904 (last visited September 15, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18609433. IMMERSION EXPOSURE TOOL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18609433._IMMERSION_EXPOSURE_TOOL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=93904",
note = "[Online; accessed 15-September-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18609433. IMMERSION EXPOSURE TOOL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18609433._IMMERSION_EXPOSURE_TOOL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=93904}",
note = "[Online; accessed 15-September-2024]"
}
