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Bibliographic details for Taiwan semiconductor manufacturing company, ltd. (20240231241). DROPLET SPLASH CONTROL FOR EXTREME ULTRAVIOLET PHOTOLITHOGRAPHY simplified abstract
- Page name: Taiwan semiconductor manufacturing company, ltd. (20240231241). DROPLET SPLASH CONTROL FOR EXTREME ULTRAVIOLET PHOTOLITHOGRAPHY simplified abstract
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 11 July 2024 07:32 UTC
- Date retrieved: 15 September 2024 14:22 UTC
- Permanent URL: http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_company,_ltd._(20240231241)._DROPLET_SPLASH_CONTROL_FOR_EXTREME_ULTRAVIOLET_PHOTOLITHOGRAPHY_simplified_abstract&oldid=92349
- Page Version ID: 92349
Citation styles for Taiwan semiconductor manufacturing company, ltd. (20240231241). DROPLET SPLASH CONTROL FOR EXTREME ULTRAVIOLET PHOTOLITHOGRAPHY simplified abstract
APA style
Taiwan semiconductor manufacturing company, ltd. (20240231241). DROPLET SPLASH CONTROL FOR EXTREME ULTRAVIOLET PHOTOLITHOGRAPHY simplified abstract. (2024, July 11). WikiPatents, . Retrieved 14:22, September 15, 2024 from http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_company,_ltd._(20240231241)._DROPLET_SPLASH_CONTROL_FOR_EXTREME_ULTRAVIOLET_PHOTOLITHOGRAPHY_simplified_abstract&oldid=92349.
MLA style
"Taiwan semiconductor manufacturing company, ltd. (20240231241). DROPLET SPLASH CONTROL FOR EXTREME ULTRAVIOLET PHOTOLITHOGRAPHY simplified abstract." WikiPatents, . 11 Jul 2024, 07:32 UTC. 15 Sep 2024, 14:22 <http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_company,_ltd._(20240231241)._DROPLET_SPLASH_CONTROL_FOR_EXTREME_ULTRAVIOLET_PHOTOLITHOGRAPHY_simplified_abstract&oldid=92349>.
MHRA style
WikiPatents contributors, 'Taiwan semiconductor manufacturing company, ltd. (20240231241). DROPLET SPLASH CONTROL FOR EXTREME ULTRAVIOLET PHOTOLITHOGRAPHY simplified abstract', WikiPatents, , 11 July 2024, 07:32 UTC, <http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_company,_ltd._(20240231241)._DROPLET_SPLASH_CONTROL_FOR_EXTREME_ULTRAVIOLET_PHOTOLITHOGRAPHY_simplified_abstract&oldid=92349> [accessed 15 September 2024]
Chicago style
WikiPatents contributors, "Taiwan semiconductor manufacturing company, ltd. (20240231241). DROPLET SPLASH CONTROL FOR EXTREME ULTRAVIOLET PHOTOLITHOGRAPHY simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_company,_ltd._(20240231241)._DROPLET_SPLASH_CONTROL_FOR_EXTREME_ULTRAVIOLET_PHOTOLITHOGRAPHY_simplified_abstract&oldid=92349 (accessed September 15, 2024).
CBE/CSE style
WikiPatents contributors. Taiwan semiconductor manufacturing company, ltd. (20240231241). DROPLET SPLASH CONTROL FOR EXTREME ULTRAVIOLET PHOTOLITHOGRAPHY simplified abstract [Internet]. WikiPatents, ; 2024 Jul 11, 07:32 UTC [cited 2024 Sep 15]. Available from: http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_company,_ltd._(20240231241)._DROPLET_SPLASH_CONTROL_FOR_EXTREME_ULTRAVIOLET_PHOTOLITHOGRAPHY_simplified_abstract&oldid=92349.
Bluebook style
Taiwan semiconductor manufacturing company, ltd. (20240231241). DROPLET SPLASH CONTROL FOR EXTREME ULTRAVIOLET PHOTOLITHOGRAPHY simplified abstract, http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_company,_ltd._(20240231241)._DROPLET_SPLASH_CONTROL_FOR_EXTREME_ULTRAVIOLET_PHOTOLITHOGRAPHY_simplified_abstract&oldid=92349 (last visited September 15, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "Taiwan semiconductor manufacturing company, ltd. (20240231241). DROPLET SPLASH CONTROL FOR EXTREME ULTRAVIOLET PHOTOLITHOGRAPHY simplified abstract --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_company,_ltd._(20240231241)._DROPLET_SPLASH_CONTROL_FOR_EXTREME_ULTRAVIOLET_PHOTOLITHOGRAPHY_simplified_abstract&oldid=92349",
note = "[Online; accessed 15-September-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "Taiwan semiconductor manufacturing company, ltd. (20240231241). DROPLET SPLASH CONTROL FOR EXTREME ULTRAVIOLET PHOTOLITHOGRAPHY simplified abstract --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_company,_ltd._(20240231241)._DROPLET_SPLASH_CONTROL_FOR_EXTREME_ULTRAVIOLET_PHOTOLITHOGRAPHY_simplified_abstract&oldid=92349}",
note = "[Online; accessed 15-September-2024]"
}
