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Bibliographic details for US Patent Application 18231017. EUV LIGHT SOURCE AND APPARATUS FOR LITHOGRAPHY simplified abstract
- Page name: US Patent Application 18231017. EUV LIGHT SOURCE AND APPARATUS FOR LITHOGRAPHY simplified abstract
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 1 December 2023 10:21 UTC
- Date retrieved: 17 June 2024 14:41 UTC
- Permanent URL: http://wikipatents.org/index.php?title=US_Patent_Application_18231017._EUV_LIGHT_SOURCE_AND_APPARATUS_FOR_LITHOGRAPHY_simplified_abstract&oldid=9044
- Page Version ID: 9044
Citation styles for US Patent Application 18231017. EUV LIGHT SOURCE AND APPARATUS FOR LITHOGRAPHY simplified abstract
APA style
US Patent Application 18231017. EUV LIGHT SOURCE AND APPARATUS FOR LITHOGRAPHY simplified abstract. (2023, December 1). WikiPatents, . Retrieved 14:41, June 17, 2024 from http://wikipatents.org/index.php?title=US_Patent_Application_18231017._EUV_LIGHT_SOURCE_AND_APPARATUS_FOR_LITHOGRAPHY_simplified_abstract&oldid=9044.
MLA style
"US Patent Application 18231017. EUV LIGHT SOURCE AND APPARATUS FOR LITHOGRAPHY simplified abstract." WikiPatents, . 1 Dec 2023, 10:21 UTC. 17 Jun 2024, 14:41 <http://wikipatents.org/index.php?title=US_Patent_Application_18231017._EUV_LIGHT_SOURCE_AND_APPARATUS_FOR_LITHOGRAPHY_simplified_abstract&oldid=9044>.
MHRA style
WikiPatents contributors, 'US Patent Application 18231017. EUV LIGHT SOURCE AND APPARATUS FOR LITHOGRAPHY simplified abstract', WikiPatents, , 1 December 2023, 10:21 UTC, <http://wikipatents.org/index.php?title=US_Patent_Application_18231017._EUV_LIGHT_SOURCE_AND_APPARATUS_FOR_LITHOGRAPHY_simplified_abstract&oldid=9044> [accessed 17 June 2024]
Chicago style
WikiPatents contributors, "US Patent Application 18231017. EUV LIGHT SOURCE AND APPARATUS FOR LITHOGRAPHY simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=US_Patent_Application_18231017._EUV_LIGHT_SOURCE_AND_APPARATUS_FOR_LITHOGRAPHY_simplified_abstract&oldid=9044 (accessed June 17, 2024).
CBE/CSE style
WikiPatents contributors. US Patent Application 18231017. EUV LIGHT SOURCE AND APPARATUS FOR LITHOGRAPHY simplified abstract [Internet]. WikiPatents, ; 2023 Dec 1, 10:21 UTC [cited 2024 Jun 17]. Available from: http://wikipatents.org/index.php?title=US_Patent_Application_18231017._EUV_LIGHT_SOURCE_AND_APPARATUS_FOR_LITHOGRAPHY_simplified_abstract&oldid=9044.
Bluebook style
US Patent Application 18231017. EUV LIGHT SOURCE AND APPARATUS FOR LITHOGRAPHY simplified abstract, http://wikipatents.org/index.php?title=US_Patent_Application_18231017._EUV_LIGHT_SOURCE_AND_APPARATUS_FOR_LITHOGRAPHY_simplified_abstract&oldid=9044 (last visited June 17, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "US Patent Application 18231017. EUV LIGHT SOURCE AND APPARATUS FOR LITHOGRAPHY simplified abstract --- WikiPatents{,} ",
year = "2023",
url = "http://wikipatents.org/index.php?title=US_Patent_Application_18231017._EUV_LIGHT_SOURCE_AND_APPARATUS_FOR_LITHOGRAPHY_simplified_abstract&oldid=9044",
note = "[Online; accessed 17-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "US Patent Application 18231017. EUV LIGHT SOURCE AND APPARATUS FOR LITHOGRAPHY simplified abstract --- WikiPatents{,} ",
year = "2023",
url = "\url{http://wikipatents.org/index.php?title=US_Patent_Application_18231017._EUV_LIGHT_SOURCE_AND_APPARATUS_FOR_LITHOGRAPHY_simplified_abstract&oldid=9044}",
note = "[Online; accessed 17-June-2024]"
}
