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Bibliographic details for 18591336. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)
- Page name: 18591336. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 8 July 2024 06:30 UTC
- Date retrieved: 19 September 2024 04:08 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18591336._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_AND_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=89261
- Page Version ID: 89261
Citation styles for 18591336. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)
APA style
18591336. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation). (2024, July 8). WikiPatents, . Retrieved 04:08, September 19, 2024 from http://wikipatents.org/index.php?title=18591336._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_AND_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=89261.
MLA style
"18591336. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)." WikiPatents, . 8 Jul 2024, 06:30 UTC. 19 Sep 2024, 04:08 <http://wikipatents.org/index.php?title=18591336._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_AND_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=89261>.
MHRA style
WikiPatents contributors, '18591336. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)', WikiPatents, , 8 July 2024, 06:30 UTC, <http://wikipatents.org/index.php?title=18591336._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_AND_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=89261> [accessed 19 September 2024]
Chicago style
WikiPatents contributors, "18591336. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)," WikiPatents, , http://wikipatents.org/index.php?title=18591336._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_AND_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=89261 (accessed September 19, 2024).
CBE/CSE style
WikiPatents contributors. 18591336. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation) [Internet]. WikiPatents, ; 2024 Jul 8, 06:30 UTC [cited 2024 Sep 19]. Available from: http://wikipatents.org/index.php?title=18591336._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_AND_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=89261.
Bluebook style
18591336. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation), http://wikipatents.org/index.php?title=18591336._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_AND_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=89261 (last visited September 19, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18591336. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18591336._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_AND_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=89261",
note = "[Online; accessed 19-September-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18591336. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18591336._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_AND_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=89261}",
note = "[Online; accessed 19-September-2024]"
}
