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Bibliographic details for 18608204. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)
- Page name: 18608204. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 8 July 2024 06:30 UTC
- Date retrieved: 6 September 2024 00:32 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18608204._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=89259
- Page Version ID: 89259
Citation styles for 18608204. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)
APA style
18608204. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation). (2024, July 8). WikiPatents, . Retrieved 00:32, September 6, 2024 from http://wikipatents.org/index.php?title=18608204._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=89259.
MLA style
"18608204. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)." WikiPatents, . 8 Jul 2024, 06:30 UTC. 6 Sep 2024, 00:32 <http://wikipatents.org/index.php?title=18608204._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=89259>.
MHRA style
WikiPatents contributors, '18608204. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)', WikiPatents, , 8 July 2024, 06:30 UTC, <http://wikipatents.org/index.php?title=18608204._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=89259> [accessed 6 September 2024]
Chicago style
WikiPatents contributors, "18608204. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)," WikiPatents, , http://wikipatents.org/index.php?title=18608204._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=89259 (accessed September 6, 2024).
CBE/CSE style
WikiPatents contributors. 18608204. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation) [Internet]. WikiPatents, ; 2024 Jul 8, 06:30 UTC [cited 2024 Sep 6]. Available from: http://wikipatents.org/index.php?title=18608204._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=89259.
Bluebook style
18608204. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation), http://wikipatents.org/index.php?title=18608204._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=89259 (last visited September 6, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "18608204. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=18608204._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=89259", note = "[Online; accessed 6-September-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "18608204. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=18608204._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=89259}", note = "[Online; accessed 6-September-2024]" }