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Bibliographic details for US Patent Application 18447810. METHOD FOR IMPROVED POLYSILICON ETCH DIMENSIONAL CONTROL simplified abstract
- Page name: US Patent Application 18447810. METHOD FOR IMPROVED POLYSILICON ETCH DIMENSIONAL CONTROL simplified abstract
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 30 November 2023 15:19 UTC
- Date retrieved: 22 September 2024 04:00 UTC
- Permanent URL: http://wikipatents.org/index.php?title=US_Patent_Application_18447810._METHOD_FOR_IMPROVED_POLYSILICON_ETCH_DIMENSIONAL_CONTROL_simplified_abstract&oldid=8922
- Page Version ID: 8922
Citation styles for US Patent Application 18447810. METHOD FOR IMPROVED POLYSILICON ETCH DIMENSIONAL CONTROL simplified abstract
APA style
US Patent Application 18447810. METHOD FOR IMPROVED POLYSILICON ETCH DIMENSIONAL CONTROL simplified abstract. (2023, November 30). WikiPatents, . Retrieved 04:00, September 22, 2024 from http://wikipatents.org/index.php?title=US_Patent_Application_18447810._METHOD_FOR_IMPROVED_POLYSILICON_ETCH_DIMENSIONAL_CONTROL_simplified_abstract&oldid=8922.
MLA style
"US Patent Application 18447810. METHOD FOR IMPROVED POLYSILICON ETCH DIMENSIONAL CONTROL simplified abstract." WikiPatents, . 30 Nov 2023, 15:19 UTC. 22 Sep 2024, 04:00 <http://wikipatents.org/index.php?title=US_Patent_Application_18447810._METHOD_FOR_IMPROVED_POLYSILICON_ETCH_DIMENSIONAL_CONTROL_simplified_abstract&oldid=8922>.
MHRA style
WikiPatents contributors, 'US Patent Application 18447810. METHOD FOR IMPROVED POLYSILICON ETCH DIMENSIONAL CONTROL simplified abstract', WikiPatents, , 30 November 2023, 15:19 UTC, <http://wikipatents.org/index.php?title=US_Patent_Application_18447810._METHOD_FOR_IMPROVED_POLYSILICON_ETCH_DIMENSIONAL_CONTROL_simplified_abstract&oldid=8922> [accessed 22 September 2024]
Chicago style
WikiPatents contributors, "US Patent Application 18447810. METHOD FOR IMPROVED POLYSILICON ETCH DIMENSIONAL CONTROL simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=US_Patent_Application_18447810._METHOD_FOR_IMPROVED_POLYSILICON_ETCH_DIMENSIONAL_CONTROL_simplified_abstract&oldid=8922 (accessed September 22, 2024).
CBE/CSE style
WikiPatents contributors. US Patent Application 18447810. METHOD FOR IMPROVED POLYSILICON ETCH DIMENSIONAL CONTROL simplified abstract [Internet]. WikiPatents, ; 2023 Nov 30, 15:19 UTC [cited 2024 Sep 22]. Available from: http://wikipatents.org/index.php?title=US_Patent_Application_18447810._METHOD_FOR_IMPROVED_POLYSILICON_ETCH_DIMENSIONAL_CONTROL_simplified_abstract&oldid=8922.
Bluebook style
US Patent Application 18447810. METHOD FOR IMPROVED POLYSILICON ETCH DIMENSIONAL CONTROL simplified abstract, http://wikipatents.org/index.php?title=US_Patent_Application_18447810._METHOD_FOR_IMPROVED_POLYSILICON_ETCH_DIMENSIONAL_CONTROL_simplified_abstract&oldid=8922 (last visited September 22, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "US Patent Application 18447810. METHOD FOR IMPROVED POLYSILICON ETCH DIMENSIONAL CONTROL simplified abstract --- WikiPatents{,} ",
year = "2023",
url = "http://wikipatents.org/index.php?title=US_Patent_Application_18447810._METHOD_FOR_IMPROVED_POLYSILICON_ETCH_DIMENSIONAL_CONTROL_simplified_abstract&oldid=8922",
note = "[Online; accessed 22-September-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "US Patent Application 18447810. METHOD FOR IMPROVED POLYSILICON ETCH DIMENSIONAL CONTROL simplified abstract --- WikiPatents{,} ",
year = "2023",
url = "\url{http://wikipatents.org/index.php?title=US_Patent_Application_18447810._METHOD_FOR_IMPROVED_POLYSILICON_ETCH_DIMENSIONAL_CONTROL_simplified_abstract&oldid=8922}",
note = "[Online; accessed 22-September-2024]"
}
