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Bibliographic details for US Patent Application 18447410. FOCUS RING FOR A PLASMA-BASED SEMICONDUCTOR PROCESSING TOOL simplified abstract
- Page name: US Patent Application 18447410. FOCUS RING FOR A PLASMA-BASED SEMICONDUCTOR PROCESSING TOOL simplified abstract
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 30 November 2023 15:19 UTC
- Date retrieved: 21 June 2024 20:15 UTC
- Permanent URL: http://wikipatents.org/index.php?title=US_Patent_Application_18447410._FOCUS_RING_FOR_A_PLASMA-BASED_SEMICONDUCTOR_PROCESSING_TOOL_simplified_abstract&oldid=8914
- Page Version ID: 8914
Citation styles for US Patent Application 18447410. FOCUS RING FOR A PLASMA-BASED SEMICONDUCTOR PROCESSING TOOL simplified abstract
APA style
US Patent Application 18447410. FOCUS RING FOR A PLASMA-BASED SEMICONDUCTOR PROCESSING TOOL simplified abstract. (2023, November 30). WikiPatents, . Retrieved 20:15, June 21, 2024 from http://wikipatents.org/index.php?title=US_Patent_Application_18447410._FOCUS_RING_FOR_A_PLASMA-BASED_SEMICONDUCTOR_PROCESSING_TOOL_simplified_abstract&oldid=8914.
MLA style
"US Patent Application 18447410. FOCUS RING FOR A PLASMA-BASED SEMICONDUCTOR PROCESSING TOOL simplified abstract." WikiPatents, . 30 Nov 2023, 15:19 UTC. 21 Jun 2024, 20:15 <http://wikipatents.org/index.php?title=US_Patent_Application_18447410._FOCUS_RING_FOR_A_PLASMA-BASED_SEMICONDUCTOR_PROCESSING_TOOL_simplified_abstract&oldid=8914>.
MHRA style
WikiPatents contributors, 'US Patent Application 18447410. FOCUS RING FOR A PLASMA-BASED SEMICONDUCTOR PROCESSING TOOL simplified abstract', WikiPatents, , 30 November 2023, 15:19 UTC, <http://wikipatents.org/index.php?title=US_Patent_Application_18447410._FOCUS_RING_FOR_A_PLASMA-BASED_SEMICONDUCTOR_PROCESSING_TOOL_simplified_abstract&oldid=8914> [accessed 21 June 2024]
Chicago style
WikiPatents contributors, "US Patent Application 18447410. FOCUS RING FOR A PLASMA-BASED SEMICONDUCTOR PROCESSING TOOL simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=US_Patent_Application_18447410._FOCUS_RING_FOR_A_PLASMA-BASED_SEMICONDUCTOR_PROCESSING_TOOL_simplified_abstract&oldid=8914 (accessed June 21, 2024).
CBE/CSE style
WikiPatents contributors. US Patent Application 18447410. FOCUS RING FOR A PLASMA-BASED SEMICONDUCTOR PROCESSING TOOL simplified abstract [Internet]. WikiPatents, ; 2023 Nov 30, 15:19 UTC [cited 2024 Jun 21]. Available from: http://wikipatents.org/index.php?title=US_Patent_Application_18447410._FOCUS_RING_FOR_A_PLASMA-BASED_SEMICONDUCTOR_PROCESSING_TOOL_simplified_abstract&oldid=8914.
Bluebook style
US Patent Application 18447410. FOCUS RING FOR A PLASMA-BASED SEMICONDUCTOR PROCESSING TOOL simplified abstract, http://wikipatents.org/index.php?title=US_Patent_Application_18447410._FOCUS_RING_FOR_A_PLASMA-BASED_SEMICONDUCTOR_PROCESSING_TOOL_simplified_abstract&oldid=8914 (last visited June 21, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "US Patent Application 18447410. FOCUS RING FOR A PLASMA-BASED SEMICONDUCTOR PROCESSING TOOL simplified abstract --- WikiPatents{,} ",
year = "2023",
url = "http://wikipatents.org/index.php?title=US_Patent_Application_18447410._FOCUS_RING_FOR_A_PLASMA-BASED_SEMICONDUCTOR_PROCESSING_TOOL_simplified_abstract&oldid=8914",
note = "[Online; accessed 21-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "US Patent Application 18447410. FOCUS RING FOR A PLASMA-BASED SEMICONDUCTOR PROCESSING TOOL simplified abstract --- WikiPatents{,} ",
year = "2023",
url = "\url{http://wikipatents.org/index.php?title=US_Patent_Application_18447410._FOCUS_RING_FOR_A_PLASMA-BASED_SEMICONDUCTOR_PROCESSING_TOOL_simplified_abstract&oldid=8914}",
note = "[Online; accessed 21-June-2024]"
}
