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Bibliographic details for US Patent Application 18232674. PELLICLE FOR AN EUV LITHOGRAPHY MASK AND A METHOD OF MANUFACTURING THEREOF simplified abstract

Citation styles for US Patent Application 18232674. PELLICLE FOR AN EUV LITHOGRAPHY MASK AND A METHOD OF MANUFACTURING THEREOF simplified abstract

APA style

US Patent Application 18232674. PELLICLE FOR AN EUV LITHOGRAPHY MASK AND A METHOD OF MANUFACTURING THEREOF simplified abstract. (2023, November 30). WikiPatents, . Retrieved 20:21, June 21, 2024 from http://wikipatents.org/index.php?title=US_Patent_Application_18232674._PELLICLE_FOR_AN_EUV_LITHOGRAPHY_MASK_AND_A_METHOD_OF_MANUFACTURING_THEREOF_simplified_abstract&oldid=8877.

MLA style

"US Patent Application 18232674. PELLICLE FOR AN EUV LITHOGRAPHY MASK AND A METHOD OF MANUFACTURING THEREOF simplified abstract." WikiPatents, . 30 Nov 2023, 15:09 UTC. 21 Jun 2024, 20:21 <http://wikipatents.org/index.php?title=US_Patent_Application_18232674._PELLICLE_FOR_AN_EUV_LITHOGRAPHY_MASK_AND_A_METHOD_OF_MANUFACTURING_THEREOF_simplified_abstract&oldid=8877>.

MHRA style

WikiPatents contributors, 'US Patent Application 18232674. PELLICLE FOR AN EUV LITHOGRAPHY MASK AND A METHOD OF MANUFACTURING THEREOF simplified abstract', WikiPatents, , 30 November 2023, 15:09 UTC, <http://wikipatents.org/index.php?title=US_Patent_Application_18232674._PELLICLE_FOR_AN_EUV_LITHOGRAPHY_MASK_AND_A_METHOD_OF_MANUFACTURING_THEREOF_simplified_abstract&oldid=8877> [accessed 21 June 2024]

Chicago style

WikiPatents contributors, "US Patent Application 18232674. PELLICLE FOR AN EUV LITHOGRAPHY MASK AND A METHOD OF MANUFACTURING THEREOF simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=US_Patent_Application_18232674._PELLICLE_FOR_AN_EUV_LITHOGRAPHY_MASK_AND_A_METHOD_OF_MANUFACTURING_THEREOF_simplified_abstract&oldid=8877 (accessed June 21, 2024).

CBE/CSE style

WikiPatents contributors. US Patent Application 18232674. PELLICLE FOR AN EUV LITHOGRAPHY MASK AND A METHOD OF MANUFACTURING THEREOF simplified abstract [Internet]. WikiPatents, ; 2023 Nov 30, 15:09 UTC [cited 2024 Jun 21]. Available from: http://wikipatents.org/index.php?title=US_Patent_Application_18232674._PELLICLE_FOR_AN_EUV_LITHOGRAPHY_MASK_AND_A_METHOD_OF_MANUFACTURING_THEREOF_simplified_abstract&oldid=8877.

Bluebook style

US Patent Application 18232674. PELLICLE FOR AN EUV LITHOGRAPHY MASK AND A METHOD OF MANUFACTURING THEREOF simplified abstract, http://wikipatents.org/index.php?title=US_Patent_Application_18232674._PELLICLE_FOR_AN_EUV_LITHOGRAPHY_MASK_AND_A_METHOD_OF_MANUFACTURING_THEREOF_simplified_abstract&oldid=8877 (last visited June 21, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "US Patent Application 18232674. PELLICLE FOR AN EUV LITHOGRAPHY MASK AND A METHOD OF MANUFACTURING THEREOF simplified abstract --- WikiPatents{,} ",
   year = "2023",
   url = "http://wikipatents.org/index.php?title=US_Patent_Application_18232674._PELLICLE_FOR_AN_EUV_LITHOGRAPHY_MASK_AND_A_METHOD_OF_MANUFACTURING_THEREOF_simplified_abstract&oldid=8877",
   note = "[Online; accessed 21-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "US Patent Application 18232674. PELLICLE FOR AN EUV LITHOGRAPHY MASK AND A METHOD OF MANUFACTURING THEREOF simplified abstract --- WikiPatents{,} ",
   year = "2023",
   url = "\url{http://wikipatents.org/index.php?title=US_Patent_Application_18232674._PELLICLE_FOR_AN_EUV_LITHOGRAPHY_MASK_AND_A_METHOD_OF_MANUFACTURING_THEREOF_simplified_abstract&oldid=8877}",
   note = "[Online; accessed 21-June-2024]"
 }


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