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Bibliographic details for US Patent Application 18232674. PELLICLE FOR AN EUV LITHOGRAPHY MASK AND A METHOD OF MANUFACTURING THEREOF simplified abstract
- Page name: US Patent Application 18232674. PELLICLE FOR AN EUV LITHOGRAPHY MASK AND A METHOD OF MANUFACTURING THEREOF simplified abstract
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 30 November 2023 15:09 UTC
- Date retrieved: 27 June 2024 18:19 UTC
- Permanent URL: http://wikipatents.org/index.php?title=US_Patent_Application_18232674._PELLICLE_FOR_AN_EUV_LITHOGRAPHY_MASK_AND_A_METHOD_OF_MANUFACTURING_THEREOF_simplified_abstract&oldid=8877
- Page Version ID: 8877
Citation styles for US Patent Application 18232674. PELLICLE FOR AN EUV LITHOGRAPHY MASK AND A METHOD OF MANUFACTURING THEREOF simplified abstract
APA style
US Patent Application 18232674. PELLICLE FOR AN EUV LITHOGRAPHY MASK AND A METHOD OF MANUFACTURING THEREOF simplified abstract. (2023, November 30). WikiPatents, . Retrieved 18:19, June 27, 2024 from http://wikipatents.org/index.php?title=US_Patent_Application_18232674._PELLICLE_FOR_AN_EUV_LITHOGRAPHY_MASK_AND_A_METHOD_OF_MANUFACTURING_THEREOF_simplified_abstract&oldid=8877.
MLA style
"US Patent Application 18232674. PELLICLE FOR AN EUV LITHOGRAPHY MASK AND A METHOD OF MANUFACTURING THEREOF simplified abstract." WikiPatents, . 30 Nov 2023, 15:09 UTC. 27 Jun 2024, 18:19 <http://wikipatents.org/index.php?title=US_Patent_Application_18232674._PELLICLE_FOR_AN_EUV_LITHOGRAPHY_MASK_AND_A_METHOD_OF_MANUFACTURING_THEREOF_simplified_abstract&oldid=8877>.
MHRA style
WikiPatents contributors, 'US Patent Application 18232674. PELLICLE FOR AN EUV LITHOGRAPHY MASK AND A METHOD OF MANUFACTURING THEREOF simplified abstract', WikiPatents, , 30 November 2023, 15:09 UTC, <http://wikipatents.org/index.php?title=US_Patent_Application_18232674._PELLICLE_FOR_AN_EUV_LITHOGRAPHY_MASK_AND_A_METHOD_OF_MANUFACTURING_THEREOF_simplified_abstract&oldid=8877> [accessed 27 June 2024]
Chicago style
WikiPatents contributors, "US Patent Application 18232674. PELLICLE FOR AN EUV LITHOGRAPHY MASK AND A METHOD OF MANUFACTURING THEREOF simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=US_Patent_Application_18232674._PELLICLE_FOR_AN_EUV_LITHOGRAPHY_MASK_AND_A_METHOD_OF_MANUFACTURING_THEREOF_simplified_abstract&oldid=8877 (accessed June 27, 2024).
CBE/CSE style
WikiPatents contributors. US Patent Application 18232674. PELLICLE FOR AN EUV LITHOGRAPHY MASK AND A METHOD OF MANUFACTURING THEREOF simplified abstract [Internet]. WikiPatents, ; 2023 Nov 30, 15:09 UTC [cited 2024 Jun 27]. Available from: http://wikipatents.org/index.php?title=US_Patent_Application_18232674._PELLICLE_FOR_AN_EUV_LITHOGRAPHY_MASK_AND_A_METHOD_OF_MANUFACTURING_THEREOF_simplified_abstract&oldid=8877.
Bluebook style
US Patent Application 18232674. PELLICLE FOR AN EUV LITHOGRAPHY MASK AND A METHOD OF MANUFACTURING THEREOF simplified abstract, http://wikipatents.org/index.php?title=US_Patent_Application_18232674._PELLICLE_FOR_AN_EUV_LITHOGRAPHY_MASK_AND_A_METHOD_OF_MANUFACTURING_THEREOF_simplified_abstract&oldid=8877 (last visited June 27, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "US Patent Application 18232674. PELLICLE FOR AN EUV LITHOGRAPHY MASK AND A METHOD OF MANUFACTURING THEREOF simplified abstract --- WikiPatents{,} ", year = "2023", url = "http://wikipatents.org/index.php?title=US_Patent_Application_18232674._PELLICLE_FOR_AN_EUV_LITHOGRAPHY_MASK_AND_A_METHOD_OF_MANUFACTURING_THEREOF_simplified_abstract&oldid=8877", note = "[Online; accessed 27-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "US Patent Application 18232674. PELLICLE FOR AN EUV LITHOGRAPHY MASK AND A METHOD OF MANUFACTURING THEREOF simplified abstract --- WikiPatents{,} ", year = "2023", url = "\url{http://wikipatents.org/index.php?title=US_Patent_Application_18232674._PELLICLE_FOR_AN_EUV_LITHOGRAPHY_MASK_AND_A_METHOD_OF_MANUFACTURING_THEREOF_simplified_abstract&oldid=8877}", note = "[Online; accessed 27-June-2024]" }