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Bibliographic details for 18605526. NORMAL-INCIDENCE IN-SITU PROCESS MONITOR SENSOR simplified abstract (Tokyo Electron Limited)
- Page name: 18605526. NORMAL-INCIDENCE IN-SITU PROCESS MONITOR SENSOR simplified abstract (Tokyo Electron Limited)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 8 July 2024 04:29 UTC
- Date retrieved: 5 September 2024 23:28 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18605526._NORMAL-INCIDENCE_IN-SITU_PROCESS_MONITOR_SENSOR_simplified_abstract_(Tokyo_Electron_Limited)&oldid=87830
- Page Version ID: 87830
Citation styles for 18605526. NORMAL-INCIDENCE IN-SITU PROCESS MONITOR SENSOR simplified abstract (Tokyo Electron Limited)
APA style
18605526. NORMAL-INCIDENCE IN-SITU PROCESS MONITOR SENSOR simplified abstract (Tokyo Electron Limited). (2024, July 8). WikiPatents, . Retrieved 23:28, September 5, 2024 from http://wikipatents.org/index.php?title=18605526._NORMAL-INCIDENCE_IN-SITU_PROCESS_MONITOR_SENSOR_simplified_abstract_(Tokyo_Electron_Limited)&oldid=87830.
MLA style
"18605526. NORMAL-INCIDENCE IN-SITU PROCESS MONITOR SENSOR simplified abstract (Tokyo Electron Limited)." WikiPatents, . 8 Jul 2024, 04:29 UTC. 5 Sep 2024, 23:28 <http://wikipatents.org/index.php?title=18605526._NORMAL-INCIDENCE_IN-SITU_PROCESS_MONITOR_SENSOR_simplified_abstract_(Tokyo_Electron_Limited)&oldid=87830>.
MHRA style
WikiPatents contributors, '18605526. NORMAL-INCIDENCE IN-SITU PROCESS MONITOR SENSOR simplified abstract (Tokyo Electron Limited)', WikiPatents, , 8 July 2024, 04:29 UTC, <http://wikipatents.org/index.php?title=18605526._NORMAL-INCIDENCE_IN-SITU_PROCESS_MONITOR_SENSOR_simplified_abstract_(Tokyo_Electron_Limited)&oldid=87830> [accessed 5 September 2024]
Chicago style
WikiPatents contributors, "18605526. NORMAL-INCIDENCE IN-SITU PROCESS MONITOR SENSOR simplified abstract (Tokyo Electron Limited)," WikiPatents, , http://wikipatents.org/index.php?title=18605526._NORMAL-INCIDENCE_IN-SITU_PROCESS_MONITOR_SENSOR_simplified_abstract_(Tokyo_Electron_Limited)&oldid=87830 (accessed September 5, 2024).
CBE/CSE style
WikiPatents contributors. 18605526. NORMAL-INCIDENCE IN-SITU PROCESS MONITOR SENSOR simplified abstract (Tokyo Electron Limited) [Internet]. WikiPatents, ; 2024 Jul 8, 04:29 UTC [cited 2024 Sep 5]. Available from: http://wikipatents.org/index.php?title=18605526._NORMAL-INCIDENCE_IN-SITU_PROCESS_MONITOR_SENSOR_simplified_abstract_(Tokyo_Electron_Limited)&oldid=87830.
Bluebook style
18605526. NORMAL-INCIDENCE IN-SITU PROCESS MONITOR SENSOR simplified abstract (Tokyo Electron Limited), http://wikipatents.org/index.php?title=18605526._NORMAL-INCIDENCE_IN-SITU_PROCESS_MONITOR_SENSOR_simplified_abstract_(Tokyo_Electron_Limited)&oldid=87830 (last visited September 5, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18605526. NORMAL-INCIDENCE IN-SITU PROCESS MONITOR SENSOR simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18605526._NORMAL-INCIDENCE_IN-SITU_PROCESS_MONITOR_SENSOR_simplified_abstract_(Tokyo_Electron_Limited)&oldid=87830",
note = "[Online; accessed 5-September-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18605526. NORMAL-INCIDENCE IN-SITU PROCESS MONITOR SENSOR simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18605526._NORMAL-INCIDENCE_IN-SITU_PROCESS_MONITOR_SENSOR_simplified_abstract_(Tokyo_Electron_Limited)&oldid=87830}",
note = "[Online; accessed 5-September-2024]"
}
