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Bibliographic details for 18605996. PLASMA PROCESSING APPARATUS, POWER SUPPLY SYSTEM, CONTROL METHOD, PROGRAM, AND STORAGE MEDIUM simplified abstract (Tokyo Electron Limited)

Citation styles for 18605996. PLASMA PROCESSING APPARATUS, POWER SUPPLY SYSTEM, CONTROL METHOD, PROGRAM, AND STORAGE MEDIUM simplified abstract (Tokyo Electron Limited)

APA style

18605996. PLASMA PROCESSING APPARATUS, POWER SUPPLY SYSTEM, CONTROL METHOD, PROGRAM, AND STORAGE MEDIUM simplified abstract (Tokyo Electron Limited). (2024, July 8). WikiPatents, . Retrieved 00:17, September 6, 2024 from http://wikipatents.org/index.php?title=18605996._PLASMA_PROCESSING_APPARATUS,_POWER_SUPPLY_SYSTEM,_CONTROL_METHOD,_PROGRAM,_AND_STORAGE_MEDIUM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=87824.

MLA style

"18605996. PLASMA PROCESSING APPARATUS, POWER SUPPLY SYSTEM, CONTROL METHOD, PROGRAM, AND STORAGE MEDIUM simplified abstract (Tokyo Electron Limited)." WikiPatents, . 8 Jul 2024, 04:29 UTC. 6 Sep 2024, 00:17 <http://wikipatents.org/index.php?title=18605996._PLASMA_PROCESSING_APPARATUS,_POWER_SUPPLY_SYSTEM,_CONTROL_METHOD,_PROGRAM,_AND_STORAGE_MEDIUM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=87824>.

MHRA style

WikiPatents contributors, '18605996. PLASMA PROCESSING APPARATUS, POWER SUPPLY SYSTEM, CONTROL METHOD, PROGRAM, AND STORAGE MEDIUM simplified abstract (Tokyo Electron Limited)', WikiPatents, , 8 July 2024, 04:29 UTC, <http://wikipatents.org/index.php?title=18605996._PLASMA_PROCESSING_APPARATUS,_POWER_SUPPLY_SYSTEM,_CONTROL_METHOD,_PROGRAM,_AND_STORAGE_MEDIUM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=87824> [accessed 6 September 2024]

Chicago style

WikiPatents contributors, "18605996. PLASMA PROCESSING APPARATUS, POWER SUPPLY SYSTEM, CONTROL METHOD, PROGRAM, AND STORAGE MEDIUM simplified abstract (Tokyo Electron Limited)," WikiPatents, , http://wikipatents.org/index.php?title=18605996._PLASMA_PROCESSING_APPARATUS,_POWER_SUPPLY_SYSTEM,_CONTROL_METHOD,_PROGRAM,_AND_STORAGE_MEDIUM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=87824 (accessed September 6, 2024).

CBE/CSE style

WikiPatents contributors. 18605996. PLASMA PROCESSING APPARATUS, POWER SUPPLY SYSTEM, CONTROL METHOD, PROGRAM, AND STORAGE MEDIUM simplified abstract (Tokyo Electron Limited) [Internet]. WikiPatents, ; 2024 Jul 8, 04:29 UTC [cited 2024 Sep 6]. Available from: http://wikipatents.org/index.php?title=18605996._PLASMA_PROCESSING_APPARATUS,_POWER_SUPPLY_SYSTEM,_CONTROL_METHOD,_PROGRAM,_AND_STORAGE_MEDIUM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=87824.

Bluebook style

18605996. PLASMA PROCESSING APPARATUS, POWER SUPPLY SYSTEM, CONTROL METHOD, PROGRAM, AND STORAGE MEDIUM simplified abstract (Tokyo Electron Limited), http://wikipatents.org/index.php?title=18605996._PLASMA_PROCESSING_APPARATUS,_POWER_SUPPLY_SYSTEM,_CONTROL_METHOD,_PROGRAM,_AND_STORAGE_MEDIUM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=87824 (last visited September 6, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18605996. PLASMA PROCESSING APPARATUS, POWER SUPPLY SYSTEM, CONTROL METHOD, PROGRAM, AND STORAGE MEDIUM simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18605996._PLASMA_PROCESSING_APPARATUS,_POWER_SUPPLY_SYSTEM,_CONTROL_METHOD,_PROGRAM,_AND_STORAGE_MEDIUM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=87824",
   note = "[Online; accessed 6-September-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18605996. PLASMA PROCESSING APPARATUS, POWER SUPPLY SYSTEM, CONTROL METHOD, PROGRAM, AND STORAGE MEDIUM simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18605996._PLASMA_PROCESSING_APPARATUS,_POWER_SUPPLY_SYSTEM,_CONTROL_METHOD,_PROGRAM,_AND_STORAGE_MEDIUM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=87824}",
   note = "[Online; accessed 6-September-2024]"
 }


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