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Bibliographic details for 18149829. SELECTIVE METAL SELECTIVITY IMPROVEMENT WITH RF PULSING simplified abstract (Applied Materials, Inc.)
- Page name: 18149829. SELECTIVE METAL SELECTIVITY IMPROVEMENT WITH RF PULSING simplified abstract (Applied Materials, Inc.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 8 July 2024 04:25 UTC
- Date retrieved: 5 September 2024 22:59 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18149829._SELECTIVE_METAL_SELECTIVITY_IMPROVEMENT_WITH_RF_PULSING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=87778
- Page Version ID: 87778
Citation styles for 18149829. SELECTIVE METAL SELECTIVITY IMPROVEMENT WITH RF PULSING simplified abstract (Applied Materials, Inc.)
APA style
18149829. SELECTIVE METAL SELECTIVITY IMPROVEMENT WITH RF PULSING simplified abstract (Applied Materials, Inc.). (2024, July 8). WikiPatents, . Retrieved 22:59, September 5, 2024 from http://wikipatents.org/index.php?title=18149829._SELECTIVE_METAL_SELECTIVITY_IMPROVEMENT_WITH_RF_PULSING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=87778.
MLA style
"18149829. SELECTIVE METAL SELECTIVITY IMPROVEMENT WITH RF PULSING simplified abstract (Applied Materials, Inc.)." WikiPatents, . 8 Jul 2024, 04:25 UTC. 5 Sep 2024, 22:59 <http://wikipatents.org/index.php?title=18149829._SELECTIVE_METAL_SELECTIVITY_IMPROVEMENT_WITH_RF_PULSING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=87778>.
MHRA style
WikiPatents contributors, '18149829. SELECTIVE METAL SELECTIVITY IMPROVEMENT WITH RF PULSING simplified abstract (Applied Materials, Inc.)', WikiPatents, , 8 July 2024, 04:25 UTC, <http://wikipatents.org/index.php?title=18149829._SELECTIVE_METAL_SELECTIVITY_IMPROVEMENT_WITH_RF_PULSING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=87778> [accessed 5 September 2024]
Chicago style
WikiPatents contributors, "18149829. SELECTIVE METAL SELECTIVITY IMPROVEMENT WITH RF PULSING simplified abstract (Applied Materials, Inc.)," WikiPatents, , http://wikipatents.org/index.php?title=18149829._SELECTIVE_METAL_SELECTIVITY_IMPROVEMENT_WITH_RF_PULSING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=87778 (accessed September 5, 2024).
CBE/CSE style
WikiPatents contributors. 18149829. SELECTIVE METAL SELECTIVITY IMPROVEMENT WITH RF PULSING simplified abstract (Applied Materials, Inc.) [Internet]. WikiPatents, ; 2024 Jul 8, 04:25 UTC [cited 2024 Sep 5]. Available from: http://wikipatents.org/index.php?title=18149829._SELECTIVE_METAL_SELECTIVITY_IMPROVEMENT_WITH_RF_PULSING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=87778.
Bluebook style
18149829. SELECTIVE METAL SELECTIVITY IMPROVEMENT WITH RF PULSING simplified abstract (Applied Materials, Inc.), http://wikipatents.org/index.php?title=18149829._SELECTIVE_METAL_SELECTIVITY_IMPROVEMENT_WITH_RF_PULSING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=87778 (last visited September 5, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18149829. SELECTIVE METAL SELECTIVITY IMPROVEMENT WITH RF PULSING simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18149829._SELECTIVE_METAL_SELECTIVITY_IMPROVEMENT_WITH_RF_PULSING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=87778",
note = "[Online; accessed 5-September-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18149829. SELECTIVE METAL SELECTIVITY IMPROVEMENT WITH RF PULSING simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18149829._SELECTIVE_METAL_SELECTIVITY_IMPROVEMENT_WITH_RF_PULSING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=87778}",
note = "[Online; accessed 5-September-2024]"
}
