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Bibliographic details for Taiwan semiconductor manufacturing co., ltd. (20240217052). ZONE-BASED CMP TARGET CONTROL simplified abstract
- Page name: Taiwan semiconductor manufacturing co., ltd. (20240217052). ZONE-BASED CMP TARGET CONTROL simplified abstract
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 4 July 2024 16:43 UTC
- Date retrieved: 16 July 2024 12:58 UTC
- Permanent URL: http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240217052)._ZONE-BASED_CMP_TARGET_CONTROL_simplified_abstract&oldid=84512
- Page Version ID: 84512
Citation styles for Taiwan semiconductor manufacturing co., ltd. (20240217052). ZONE-BASED CMP TARGET CONTROL simplified abstract
APA style
Taiwan semiconductor manufacturing co., ltd. (20240217052). ZONE-BASED CMP TARGET CONTROL simplified abstract. (2024, July 4). WikiPatents, . Retrieved 12:58, July 16, 2024 from http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240217052)._ZONE-BASED_CMP_TARGET_CONTROL_simplified_abstract&oldid=84512.
MLA style
"Taiwan semiconductor manufacturing co., ltd. (20240217052). ZONE-BASED CMP TARGET CONTROL simplified abstract." WikiPatents, . 4 Jul 2024, 16:43 UTC. 16 Jul 2024, 12:58 <http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240217052)._ZONE-BASED_CMP_TARGET_CONTROL_simplified_abstract&oldid=84512>.
MHRA style
WikiPatents contributors, 'Taiwan semiconductor manufacturing co., ltd. (20240217052). ZONE-BASED CMP TARGET CONTROL simplified abstract', WikiPatents, , 4 July 2024, 16:43 UTC, <http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240217052)._ZONE-BASED_CMP_TARGET_CONTROL_simplified_abstract&oldid=84512> [accessed 16 July 2024]
Chicago style
WikiPatents contributors, "Taiwan semiconductor manufacturing co., ltd. (20240217052). ZONE-BASED CMP TARGET CONTROL simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240217052)._ZONE-BASED_CMP_TARGET_CONTROL_simplified_abstract&oldid=84512 (accessed July 16, 2024).
CBE/CSE style
WikiPatents contributors. Taiwan semiconductor manufacturing co., ltd. (20240217052). ZONE-BASED CMP TARGET CONTROL simplified abstract [Internet]. WikiPatents, ; 2024 Jul 4, 16:43 UTC [cited 2024 Jul 16]. Available from: http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240217052)._ZONE-BASED_CMP_TARGET_CONTROL_simplified_abstract&oldid=84512.
Bluebook style
Taiwan semiconductor manufacturing co., ltd. (20240217052). ZONE-BASED CMP TARGET CONTROL simplified abstract, http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240217052)._ZONE-BASED_CMP_TARGET_CONTROL_simplified_abstract&oldid=84512 (last visited July 16, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "Taiwan semiconductor manufacturing co., ltd. (20240217052). ZONE-BASED CMP TARGET CONTROL simplified abstract --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240217052)._ZONE-BASED_CMP_TARGET_CONTROL_simplified_abstract&oldid=84512",
note = "[Online; accessed 16-July-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "Taiwan semiconductor manufacturing co., ltd. (20240217052). ZONE-BASED CMP TARGET CONTROL simplified abstract --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240217052)._ZONE-BASED_CMP_TARGET_CONTROL_simplified_abstract&oldid=84512}",
note = "[Online; accessed 16-July-2024]"
}
