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Bibliographic details for 18545448. EDDY CURRENT SENSOR, POLISHING APPARATUS, AND FILM THICKNESS DETECTION METHOD simplified abstract (EBARA CORPORATION)

Citation styles for 18545448. EDDY CURRENT SENSOR, POLISHING APPARATUS, AND FILM THICKNESS DETECTION METHOD simplified abstract (EBARA CORPORATION)

APA style

18545448. EDDY CURRENT SENSOR, POLISHING APPARATUS, AND FILM THICKNESS DETECTION METHOD simplified abstract (EBARA CORPORATION). (2024, June 28). WikiPatents, . Retrieved 19:41, July 2, 2024 from http://wikipatents.org/index.php?title=18545448._EDDY_CURRENT_SENSOR,_POLISHING_APPARATUS,_AND_FILM_THICKNESS_DETECTION_METHOD_simplified_abstract_(EBARA_CORPORATION)&oldid=81507.

MLA style

"18545448. EDDY CURRENT SENSOR, POLISHING APPARATUS, AND FILM THICKNESS DETECTION METHOD simplified abstract (EBARA CORPORATION)." WikiPatents, . 28 Jun 2024, 07:27 UTC. 2 Jul 2024, 19:41 <http://wikipatents.org/index.php?title=18545448._EDDY_CURRENT_SENSOR,_POLISHING_APPARATUS,_AND_FILM_THICKNESS_DETECTION_METHOD_simplified_abstract_(EBARA_CORPORATION)&oldid=81507>.

MHRA style

WikiPatents contributors, '18545448. EDDY CURRENT SENSOR, POLISHING APPARATUS, AND FILM THICKNESS DETECTION METHOD simplified abstract (EBARA CORPORATION)', WikiPatents, , 28 June 2024, 07:27 UTC, <http://wikipatents.org/index.php?title=18545448._EDDY_CURRENT_SENSOR,_POLISHING_APPARATUS,_AND_FILM_THICKNESS_DETECTION_METHOD_simplified_abstract_(EBARA_CORPORATION)&oldid=81507> [accessed 2 July 2024]

Chicago style

WikiPatents contributors, "18545448. EDDY CURRENT SENSOR, POLISHING APPARATUS, AND FILM THICKNESS DETECTION METHOD simplified abstract (EBARA CORPORATION)," WikiPatents, , http://wikipatents.org/index.php?title=18545448._EDDY_CURRENT_SENSOR,_POLISHING_APPARATUS,_AND_FILM_THICKNESS_DETECTION_METHOD_simplified_abstract_(EBARA_CORPORATION)&oldid=81507 (accessed July 2, 2024).

CBE/CSE style

WikiPatents contributors. 18545448. EDDY CURRENT SENSOR, POLISHING APPARATUS, AND FILM THICKNESS DETECTION METHOD simplified abstract (EBARA CORPORATION) [Internet]. WikiPatents, ; 2024 Jun 28, 07:27 UTC [cited 2024 Jul 2]. Available from: http://wikipatents.org/index.php?title=18545448._EDDY_CURRENT_SENSOR,_POLISHING_APPARATUS,_AND_FILM_THICKNESS_DETECTION_METHOD_simplified_abstract_(EBARA_CORPORATION)&oldid=81507.

Bluebook style

18545448. EDDY CURRENT SENSOR, POLISHING APPARATUS, AND FILM THICKNESS DETECTION METHOD simplified abstract (EBARA CORPORATION), http://wikipatents.org/index.php?title=18545448._EDDY_CURRENT_SENSOR,_POLISHING_APPARATUS,_AND_FILM_THICKNESS_DETECTION_METHOD_simplified_abstract_(EBARA_CORPORATION)&oldid=81507 (last visited July 2, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18545448. EDDY CURRENT SENSOR, POLISHING APPARATUS, AND FILM THICKNESS DETECTION METHOD simplified abstract (EBARA CORPORATION) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18545448._EDDY_CURRENT_SENSOR,_POLISHING_APPARATUS,_AND_FILM_THICKNESS_DETECTION_METHOD_simplified_abstract_(EBARA_CORPORATION)&oldid=81507",
   note = "[Online; accessed 2-July-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18545448. EDDY CURRENT SENSOR, POLISHING APPARATUS, AND FILM THICKNESS DETECTION METHOD simplified abstract (EBARA CORPORATION) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18545448._EDDY_CURRENT_SENSOR,_POLISHING_APPARATUS,_AND_FILM_THICKNESS_DETECTION_METHOD_simplified_abstract_(EBARA_CORPORATION)&oldid=81507}",
   note = "[Online; accessed 2-July-2024]"
 }


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