Cite This Page
Bibliographic details for 18392102. SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)
- Page name: 18392102. SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 28 June 2024 06:34 UTC
- Date retrieved: 3 July 2024 09:02 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18392102._SUBSTRATE_SUPPORT_AND_PLASMA_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=80984
- Page Version ID: 80984
Citation styles for 18392102. SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)
APA style
18392102. SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited). (2024, June 28). WikiPatents, . Retrieved 09:02, July 3, 2024 from http://wikipatents.org/index.php?title=18392102._SUBSTRATE_SUPPORT_AND_PLASMA_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=80984.
MLA style
"18392102. SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)." WikiPatents, . 28 Jun 2024, 06:34 UTC. 3 Jul 2024, 09:02 <http://wikipatents.org/index.php?title=18392102._SUBSTRATE_SUPPORT_AND_PLASMA_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=80984>.
MHRA style
WikiPatents contributors, '18392102. SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)', WikiPatents, , 28 June 2024, 06:34 UTC, <http://wikipatents.org/index.php?title=18392102._SUBSTRATE_SUPPORT_AND_PLASMA_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=80984> [accessed 3 July 2024]
Chicago style
WikiPatents contributors, "18392102. SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)," WikiPatents, , http://wikipatents.org/index.php?title=18392102._SUBSTRATE_SUPPORT_AND_PLASMA_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=80984 (accessed July 3, 2024).
CBE/CSE style
WikiPatents contributors. 18392102. SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited) [Internet]. WikiPatents, ; 2024 Jun 28, 06:34 UTC [cited 2024 Jul 3]. Available from: http://wikipatents.org/index.php?title=18392102._SUBSTRATE_SUPPORT_AND_PLASMA_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=80984.
Bluebook style
18392102. SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited), http://wikipatents.org/index.php?title=18392102._SUBSTRATE_SUPPORT_AND_PLASMA_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=80984 (last visited July 3, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18392102. SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18392102._SUBSTRATE_SUPPORT_AND_PLASMA_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=80984",
note = "[Online; accessed 3-July-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18392102. SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18392102._SUBSTRATE_SUPPORT_AND_PLASMA_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=80984}",
note = "[Online; accessed 3-July-2024]"
}
