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Bibliographic details for 18598613. METHOD FOR DETERMINING AMOUNT OF WEAR OF EDGE RING, PLASMA PROCESSING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM simplified abstract (Tokyo Electron Limited)

Citation styles for 18598613. METHOD FOR DETERMINING AMOUNT OF WEAR OF EDGE RING, PLASMA PROCESSING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM simplified abstract (Tokyo Electron Limited)

APA style

18598613. METHOD FOR DETERMINING AMOUNT OF WEAR OF EDGE RING, PLASMA PROCESSING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM simplified abstract (Tokyo Electron Limited). (2024, June 28). WikiPatents, . Retrieved 08:47, July 3, 2024 from http://wikipatents.org/index.php?title=18598613._METHOD_FOR_DETERMINING_AMOUNT_OF_WEAR_OF_EDGE_RING,_PLASMA_PROCESSING_APPARATUS,_AND_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=80980.

MLA style

"18598613. METHOD FOR DETERMINING AMOUNT OF WEAR OF EDGE RING, PLASMA PROCESSING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM simplified abstract (Tokyo Electron Limited)." WikiPatents, . 28 Jun 2024, 06:34 UTC. 3 Jul 2024, 08:47 <http://wikipatents.org/index.php?title=18598613._METHOD_FOR_DETERMINING_AMOUNT_OF_WEAR_OF_EDGE_RING,_PLASMA_PROCESSING_APPARATUS,_AND_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=80980>.

MHRA style

WikiPatents contributors, '18598613. METHOD FOR DETERMINING AMOUNT OF WEAR OF EDGE RING, PLASMA PROCESSING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM simplified abstract (Tokyo Electron Limited)', WikiPatents, , 28 June 2024, 06:34 UTC, <http://wikipatents.org/index.php?title=18598613._METHOD_FOR_DETERMINING_AMOUNT_OF_WEAR_OF_EDGE_RING,_PLASMA_PROCESSING_APPARATUS,_AND_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=80980> [accessed 3 July 2024]

Chicago style

WikiPatents contributors, "18598613. METHOD FOR DETERMINING AMOUNT OF WEAR OF EDGE RING, PLASMA PROCESSING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM simplified abstract (Tokyo Electron Limited)," WikiPatents, , http://wikipatents.org/index.php?title=18598613._METHOD_FOR_DETERMINING_AMOUNT_OF_WEAR_OF_EDGE_RING,_PLASMA_PROCESSING_APPARATUS,_AND_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=80980 (accessed July 3, 2024).

CBE/CSE style

WikiPatents contributors. 18598613. METHOD FOR DETERMINING AMOUNT OF WEAR OF EDGE RING, PLASMA PROCESSING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM simplified abstract (Tokyo Electron Limited) [Internet]. WikiPatents, ; 2024 Jun 28, 06:34 UTC [cited 2024 Jul 3]. Available from: http://wikipatents.org/index.php?title=18598613._METHOD_FOR_DETERMINING_AMOUNT_OF_WEAR_OF_EDGE_RING,_PLASMA_PROCESSING_APPARATUS,_AND_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=80980.

Bluebook style

18598613. METHOD FOR DETERMINING AMOUNT OF WEAR OF EDGE RING, PLASMA PROCESSING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM simplified abstract (Tokyo Electron Limited), http://wikipatents.org/index.php?title=18598613._METHOD_FOR_DETERMINING_AMOUNT_OF_WEAR_OF_EDGE_RING,_PLASMA_PROCESSING_APPARATUS,_AND_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=80980 (last visited July 3, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18598613. METHOD FOR DETERMINING AMOUNT OF WEAR OF EDGE RING, PLASMA PROCESSING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18598613._METHOD_FOR_DETERMINING_AMOUNT_OF_WEAR_OF_EDGE_RING,_PLASMA_PROCESSING_APPARATUS,_AND_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=80980",
   note = "[Online; accessed 3-July-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18598613. METHOD FOR DETERMINING AMOUNT OF WEAR OF EDGE RING, PLASMA PROCESSING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18598613._METHOD_FOR_DETERMINING_AMOUNT_OF_WEAR_OF_EDGE_RING,_PLASMA_PROCESSING_APPARATUS,_AND_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=80980}",
   note = "[Online; accessed 3-July-2024]"
 }


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