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Bibliographic details for 18541164. SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)
- Page name: 18541164. SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 28 June 2024 06:33 UTC
- Date retrieved: 4 July 2024 02:16 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18541164._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=80978
- Page Version ID: 80978
Citation styles for 18541164. SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)
APA style
18541164. SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited). (2024, June 28). WikiPatents, . Retrieved 02:16, July 4, 2024 from http://wikipatents.org/index.php?title=18541164._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=80978.
MLA style
"18541164. SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)." WikiPatents, . 28 Jun 2024, 06:33 UTC. 4 Jul 2024, 02:16 <http://wikipatents.org/index.php?title=18541164._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=80978>.
MHRA style
WikiPatents contributors, '18541164. SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)', WikiPatents, , 28 June 2024, 06:33 UTC, <http://wikipatents.org/index.php?title=18541164._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=80978> [accessed 4 July 2024]
Chicago style
WikiPatents contributors, "18541164. SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)," WikiPatents, , http://wikipatents.org/index.php?title=18541164._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=80978 (accessed July 4, 2024).
CBE/CSE style
WikiPatents contributors. 18541164. SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited) [Internet]. WikiPatents, ; 2024 Jun 28, 06:33 UTC [cited 2024 Jul 4]. Available from: http://wikipatents.org/index.php?title=18541164._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=80978.
Bluebook style
18541164. SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited), http://wikipatents.org/index.php?title=18541164._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=80978 (last visited July 4, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18541164. SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18541164._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=80978",
note = "[Online; accessed 4-July-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18541164. SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18541164._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=80978}",
note = "[Online; accessed 4-July-2024]"
}
