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Bibliographic details for 18524726. SUBSTRATE PROCESSING APPARATUS AND METHOD simplified abstract (SEMES CO., LTD.)

Citation styles for 18524726. SUBSTRATE PROCESSING APPARATUS AND METHOD simplified abstract (SEMES CO., LTD.)

APA style

18524726. SUBSTRATE PROCESSING APPARATUS AND METHOD simplified abstract (SEMES CO., LTD.). (2024, June 28). WikiPatents, . Retrieved 07:42, July 3, 2024 from http://wikipatents.org/index.php?title=18524726._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_simplified_abstract_(SEMES_CO.,_LTD.)&oldid=80786.

MLA style

"18524726. SUBSTRATE PROCESSING APPARATUS AND METHOD simplified abstract (SEMES CO., LTD.)." WikiPatents, . 28 Jun 2024, 06:15 UTC. 3 Jul 2024, 07:42 <http://wikipatents.org/index.php?title=18524726._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_simplified_abstract_(SEMES_CO.,_LTD.)&oldid=80786>.

MHRA style

WikiPatents contributors, '18524726. SUBSTRATE PROCESSING APPARATUS AND METHOD simplified abstract (SEMES CO., LTD.)', WikiPatents, , 28 June 2024, 06:15 UTC, <http://wikipatents.org/index.php?title=18524726._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_simplified_abstract_(SEMES_CO.,_LTD.)&oldid=80786> [accessed 3 July 2024]

Chicago style

WikiPatents contributors, "18524726. SUBSTRATE PROCESSING APPARATUS AND METHOD simplified abstract (SEMES CO., LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=18524726._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_simplified_abstract_(SEMES_CO.,_LTD.)&oldid=80786 (accessed July 3, 2024).

CBE/CSE style

WikiPatents contributors. 18524726. SUBSTRATE PROCESSING APPARATUS AND METHOD simplified abstract (SEMES CO., LTD.) [Internet]. WikiPatents, ; 2024 Jun 28, 06:15 UTC [cited 2024 Jul 3]. Available from: http://wikipatents.org/index.php?title=18524726._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_simplified_abstract_(SEMES_CO.,_LTD.)&oldid=80786.

Bluebook style

18524726. SUBSTRATE PROCESSING APPARATUS AND METHOD simplified abstract (SEMES CO., LTD.), http://wikipatents.org/index.php?title=18524726._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_simplified_abstract_(SEMES_CO.,_LTD.)&oldid=80786 (last visited July 3, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18524726. SUBSTRATE PROCESSING APPARATUS AND METHOD simplified abstract (SEMES CO., LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18524726._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_simplified_abstract_(SEMES_CO.,_LTD.)&oldid=80786",
   note = "[Online; accessed 3-July-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18524726. SUBSTRATE PROCESSING APPARATUS AND METHOD simplified abstract (SEMES CO., LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18524726._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_simplified_abstract_(SEMES_CO.,_LTD.)&oldid=80786}",
   note = "[Online; accessed 3-July-2024]"
 }


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