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Citation styles for 18167741. SWITCHABLE SUBSTRATE FOR EXTREME ULTRAVIOLET OR E-BEAM METALLIC RESIST simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)

APA style

18167741. SWITCHABLE SUBSTRATE FOR EXTREME ULTRAVIOLET OR E-BEAM METALLIC RESIST simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.). (2024, June 28). WikiPatents, . Retrieved 13:59, July 4, 2024 from http://wikipatents.org/index.php?title=18167741._SWITCHABLE_SUBSTRATE_FOR_EXTREME_ULTRAVIOLET_OR_E-BEAM_METALLIC_RESIST_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=79871.

MLA style

"18167741. SWITCHABLE SUBSTRATE FOR EXTREME ULTRAVIOLET OR E-BEAM METALLIC RESIST simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)." WikiPatents, . 28 Jun 2024, 04:48 UTC. 4 Jul 2024, 13:59 <http://wikipatents.org/index.php?title=18167741._SWITCHABLE_SUBSTRATE_FOR_EXTREME_ULTRAVIOLET_OR_E-BEAM_METALLIC_RESIST_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=79871>.

MHRA style

WikiPatents contributors, '18167741. SWITCHABLE SUBSTRATE FOR EXTREME ULTRAVIOLET OR E-BEAM METALLIC RESIST simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)', WikiPatents, , 28 June 2024, 04:48 UTC, <http://wikipatents.org/index.php?title=18167741._SWITCHABLE_SUBSTRATE_FOR_EXTREME_ULTRAVIOLET_OR_E-BEAM_METALLIC_RESIST_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=79871> [accessed 4 July 2024]

Chicago style

WikiPatents contributors, "18167741. SWITCHABLE SUBSTRATE FOR EXTREME ULTRAVIOLET OR E-BEAM METALLIC RESIST simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18167741._SWITCHABLE_SUBSTRATE_FOR_EXTREME_ULTRAVIOLET_OR_E-BEAM_METALLIC_RESIST_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=79871 (accessed July 4, 2024).

CBE/CSE style

WikiPatents contributors. 18167741. SWITCHABLE SUBSTRATE FOR EXTREME ULTRAVIOLET OR E-BEAM METALLIC RESIST simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.) [Internet]. WikiPatents, ; 2024 Jun 28, 04:48 UTC [cited 2024 Jul 4]. Available from: http://wikipatents.org/index.php?title=18167741._SWITCHABLE_SUBSTRATE_FOR_EXTREME_ULTRAVIOLET_OR_E-BEAM_METALLIC_RESIST_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=79871.

Bluebook style

18167741. SWITCHABLE SUBSTRATE FOR EXTREME ULTRAVIOLET OR E-BEAM METALLIC RESIST simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.), http://wikipatents.org/index.php?title=18167741._SWITCHABLE_SUBSTRATE_FOR_EXTREME_ULTRAVIOLET_OR_E-BEAM_METALLIC_RESIST_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=79871 (last visited July 4, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18167741. SWITCHABLE SUBSTRATE FOR EXTREME ULTRAVIOLET OR E-BEAM METALLIC RESIST simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18167741._SWITCHABLE_SUBSTRATE_FOR_EXTREME_ULTRAVIOLET_OR_E-BEAM_METALLIC_RESIST_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=79871",
   note = "[Online; accessed 4-July-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18167741. SWITCHABLE SUBSTRATE FOR EXTREME ULTRAVIOLET OR E-BEAM METALLIC RESIST simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18167741._SWITCHABLE_SUBSTRATE_FOR_EXTREME_ULTRAVIOLET_OR_E-BEAM_METALLIC_RESIST_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=79871}",
   note = "[Online; accessed 4-July-2024]"
 }