Cite This Page

Jump to navigation Jump to search

Bibliographic details for 18085768. CHEMICAL MECHANICAL POLISHING OF METAL GATE CUTS FORMED AFTER SOURCE AND DRAIN CONTACTS simplified abstract (Intel Corporation)

Citation styles for 18085768. CHEMICAL MECHANICAL POLISHING OF METAL GATE CUTS FORMED AFTER SOURCE AND DRAIN CONTACTS simplified abstract (Intel Corporation)

APA style

18085768. CHEMICAL MECHANICAL POLISHING OF METAL GATE CUTS FORMED AFTER SOURCE AND DRAIN CONTACTS simplified abstract (Intel Corporation). (2024, June 28). WikiPatents, . Retrieved 22:47, July 2, 2024 from http://wikipatents.org/index.php?title=18085768._CHEMICAL_MECHANICAL_POLISHING_OF_METAL_GATE_CUTS_FORMED_AFTER_SOURCE_AND_DRAIN_CONTACTS_simplified_abstract_(Intel_Corporation)&oldid=79571.

MLA style

"18085768. CHEMICAL MECHANICAL POLISHING OF METAL GATE CUTS FORMED AFTER SOURCE AND DRAIN CONTACTS simplified abstract (Intel Corporation)." WikiPatents, . 28 Jun 2024, 04:20 UTC. 2 Jul 2024, 22:47 <http://wikipatents.org/index.php?title=18085768._CHEMICAL_MECHANICAL_POLISHING_OF_METAL_GATE_CUTS_FORMED_AFTER_SOURCE_AND_DRAIN_CONTACTS_simplified_abstract_(Intel_Corporation)&oldid=79571>.

MHRA style

WikiPatents contributors, '18085768. CHEMICAL MECHANICAL POLISHING OF METAL GATE CUTS FORMED AFTER SOURCE AND DRAIN CONTACTS simplified abstract (Intel Corporation)', WikiPatents, , 28 June 2024, 04:20 UTC, <http://wikipatents.org/index.php?title=18085768._CHEMICAL_MECHANICAL_POLISHING_OF_METAL_GATE_CUTS_FORMED_AFTER_SOURCE_AND_DRAIN_CONTACTS_simplified_abstract_(Intel_Corporation)&oldid=79571> [accessed 2 July 2024]

Chicago style

WikiPatents contributors, "18085768. CHEMICAL MECHANICAL POLISHING OF METAL GATE CUTS FORMED AFTER SOURCE AND DRAIN CONTACTS simplified abstract (Intel Corporation)," WikiPatents, , http://wikipatents.org/index.php?title=18085768._CHEMICAL_MECHANICAL_POLISHING_OF_METAL_GATE_CUTS_FORMED_AFTER_SOURCE_AND_DRAIN_CONTACTS_simplified_abstract_(Intel_Corporation)&oldid=79571 (accessed July 2, 2024).

CBE/CSE style

WikiPatents contributors. 18085768. CHEMICAL MECHANICAL POLISHING OF METAL GATE CUTS FORMED AFTER SOURCE AND DRAIN CONTACTS simplified abstract (Intel Corporation) [Internet]. WikiPatents, ; 2024 Jun 28, 04:20 UTC [cited 2024 Jul 2]. Available from: http://wikipatents.org/index.php?title=18085768._CHEMICAL_MECHANICAL_POLISHING_OF_METAL_GATE_CUTS_FORMED_AFTER_SOURCE_AND_DRAIN_CONTACTS_simplified_abstract_(Intel_Corporation)&oldid=79571.

Bluebook style

18085768. CHEMICAL MECHANICAL POLISHING OF METAL GATE CUTS FORMED AFTER SOURCE AND DRAIN CONTACTS simplified abstract (Intel Corporation), http://wikipatents.org/index.php?title=18085768._CHEMICAL_MECHANICAL_POLISHING_OF_METAL_GATE_CUTS_FORMED_AFTER_SOURCE_AND_DRAIN_CONTACTS_simplified_abstract_(Intel_Corporation)&oldid=79571 (last visited July 2, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18085768. CHEMICAL MECHANICAL POLISHING OF METAL GATE CUTS FORMED AFTER SOURCE AND DRAIN CONTACTS simplified abstract (Intel Corporation) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18085768._CHEMICAL_MECHANICAL_POLISHING_OF_METAL_GATE_CUTS_FORMED_AFTER_SOURCE_AND_DRAIN_CONTACTS_simplified_abstract_(Intel_Corporation)&oldid=79571",
   note = "[Online; accessed 2-July-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18085768. CHEMICAL MECHANICAL POLISHING OF METAL GATE CUTS FORMED AFTER SOURCE AND DRAIN CONTACTS simplified abstract (Intel Corporation) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18085768._CHEMICAL_MECHANICAL_POLISHING_OF_METAL_GATE_CUTS_FORMED_AFTER_SOURCE_AND_DRAIN_CONTACTS_simplified_abstract_(Intel_Corporation)&oldid=79571}",
   note = "[Online; accessed 2-July-2024]"
 }


Retrieved from "http://wikipatents.org/index.php?title=Special:CiteThisPage"