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Bibliographic details for 18085768. CHEMICAL MECHANICAL POLISHING OF METAL GATE CUTS FORMED AFTER SOURCE AND DRAIN CONTACTS simplified abstract (Intel Corporation)
- Page name: 18085768. CHEMICAL MECHANICAL POLISHING OF METAL GATE CUTS FORMED AFTER SOURCE AND DRAIN CONTACTS simplified abstract (Intel Corporation)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 28 June 2024 04:20 UTC
- Date retrieved: 5 July 2024 02:21 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18085768._CHEMICAL_MECHANICAL_POLISHING_OF_METAL_GATE_CUTS_FORMED_AFTER_SOURCE_AND_DRAIN_CONTACTS_simplified_abstract_(Intel_Corporation)&oldid=79571
- Page Version ID: 79571
Citation styles for 18085768. CHEMICAL MECHANICAL POLISHING OF METAL GATE CUTS FORMED AFTER SOURCE AND DRAIN CONTACTS simplified abstract (Intel Corporation)
APA style
18085768. CHEMICAL MECHANICAL POLISHING OF METAL GATE CUTS FORMED AFTER SOURCE AND DRAIN CONTACTS simplified abstract (Intel Corporation). (2024, June 28). WikiPatents, . Retrieved 02:21, July 5, 2024 from http://wikipatents.org/index.php?title=18085768._CHEMICAL_MECHANICAL_POLISHING_OF_METAL_GATE_CUTS_FORMED_AFTER_SOURCE_AND_DRAIN_CONTACTS_simplified_abstract_(Intel_Corporation)&oldid=79571.
MLA style
"18085768. CHEMICAL MECHANICAL POLISHING OF METAL GATE CUTS FORMED AFTER SOURCE AND DRAIN CONTACTS simplified abstract (Intel Corporation)." WikiPatents, . 28 Jun 2024, 04:20 UTC. 5 Jul 2024, 02:21 <http://wikipatents.org/index.php?title=18085768._CHEMICAL_MECHANICAL_POLISHING_OF_METAL_GATE_CUTS_FORMED_AFTER_SOURCE_AND_DRAIN_CONTACTS_simplified_abstract_(Intel_Corporation)&oldid=79571>.
MHRA style
WikiPatents contributors, '18085768. CHEMICAL MECHANICAL POLISHING OF METAL GATE CUTS FORMED AFTER SOURCE AND DRAIN CONTACTS simplified abstract (Intel Corporation)', WikiPatents, , 28 June 2024, 04:20 UTC, <http://wikipatents.org/index.php?title=18085768._CHEMICAL_MECHANICAL_POLISHING_OF_METAL_GATE_CUTS_FORMED_AFTER_SOURCE_AND_DRAIN_CONTACTS_simplified_abstract_(Intel_Corporation)&oldid=79571> [accessed 5 July 2024]
Chicago style
WikiPatents contributors, "18085768. CHEMICAL MECHANICAL POLISHING OF METAL GATE CUTS FORMED AFTER SOURCE AND DRAIN CONTACTS simplified abstract (Intel Corporation)," WikiPatents, , http://wikipatents.org/index.php?title=18085768._CHEMICAL_MECHANICAL_POLISHING_OF_METAL_GATE_CUTS_FORMED_AFTER_SOURCE_AND_DRAIN_CONTACTS_simplified_abstract_(Intel_Corporation)&oldid=79571 (accessed July 5, 2024).
CBE/CSE style
WikiPatents contributors. 18085768. CHEMICAL MECHANICAL POLISHING OF METAL GATE CUTS FORMED AFTER SOURCE AND DRAIN CONTACTS simplified abstract (Intel Corporation) [Internet]. WikiPatents, ; 2024 Jun 28, 04:20 UTC [cited 2024 Jul 5]. Available from: http://wikipatents.org/index.php?title=18085768._CHEMICAL_MECHANICAL_POLISHING_OF_METAL_GATE_CUTS_FORMED_AFTER_SOURCE_AND_DRAIN_CONTACTS_simplified_abstract_(Intel_Corporation)&oldid=79571.
Bluebook style
18085768. CHEMICAL MECHANICAL POLISHING OF METAL GATE CUTS FORMED AFTER SOURCE AND DRAIN CONTACTS simplified abstract (Intel Corporation), http://wikipatents.org/index.php?title=18085768._CHEMICAL_MECHANICAL_POLISHING_OF_METAL_GATE_CUTS_FORMED_AFTER_SOURCE_AND_DRAIN_CONTACTS_simplified_abstract_(Intel_Corporation)&oldid=79571 (last visited July 5, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "18085768. CHEMICAL MECHANICAL POLISHING OF METAL GATE CUTS FORMED AFTER SOURCE AND DRAIN CONTACTS simplified abstract (Intel Corporation) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=18085768._CHEMICAL_MECHANICAL_POLISHING_OF_METAL_GATE_CUTS_FORMED_AFTER_SOURCE_AND_DRAIN_CONTACTS_simplified_abstract_(Intel_Corporation)&oldid=79571", note = "[Online; accessed 5-July-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "18085768. CHEMICAL MECHANICAL POLISHING OF METAL GATE CUTS FORMED AFTER SOURCE AND DRAIN CONTACTS simplified abstract (Intel Corporation) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=18085768._CHEMICAL_MECHANICAL_POLISHING_OF_METAL_GATE_CUTS_FORMED_AFTER_SOURCE_AND_DRAIN_CONTACTS_simplified_abstract_(Intel_Corporation)&oldid=79571}", note = "[Online; accessed 5-July-2024]" }