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Bibliographic details for 18542946. CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA)

Citation styles for 18542946. CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA)

APA style

18542946. CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA). (2024, June 28). WikiPatents, . Retrieved 07:37, July 3, 2024 from http://wikipatents.org/index.php?title=18542946._CONTROL_APPARATUS,_LITHOGRAPHY_APPARATUS,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=79478.

MLA style

"18542946. CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA)." WikiPatents, . 28 Jun 2024, 04:11 UTC. 3 Jul 2024, 07:37 <http://wikipatents.org/index.php?title=18542946._CONTROL_APPARATUS,_LITHOGRAPHY_APPARATUS,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=79478>.

MHRA style

WikiPatents contributors, '18542946. CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA)', WikiPatents, , 28 June 2024, 04:11 UTC, <http://wikipatents.org/index.php?title=18542946._CONTROL_APPARATUS,_LITHOGRAPHY_APPARATUS,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=79478> [accessed 3 July 2024]

Chicago style

WikiPatents contributors, "18542946. CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA)," WikiPatents, , http://wikipatents.org/index.php?title=18542946._CONTROL_APPARATUS,_LITHOGRAPHY_APPARATUS,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=79478 (accessed July 3, 2024).

CBE/CSE style

WikiPatents contributors. 18542946. CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA) [Internet]. WikiPatents, ; 2024 Jun 28, 04:11 UTC [cited 2024 Jul 3]. Available from: http://wikipatents.org/index.php?title=18542946._CONTROL_APPARATUS,_LITHOGRAPHY_APPARATUS,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=79478.

Bluebook style

18542946. CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA), http://wikipatents.org/index.php?title=18542946._CONTROL_APPARATUS,_LITHOGRAPHY_APPARATUS,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=79478 (last visited July 3, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18542946. CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18542946._CONTROL_APPARATUS,_LITHOGRAPHY_APPARATUS,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=79478",
   note = "[Online; accessed 3-July-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18542946. CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18542946._CONTROL_APPARATUS,_LITHOGRAPHY_APPARATUS,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=79478}",
   note = "[Online; accessed 3-July-2024]"
 }


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