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Bibliographic details for 18226873. CLEANER FOR CHEMICAL MECHANICAL POLISHING APPARATUS simplified abstract (Samsung Electronics Co., Ltd.)
- Page name: 18226873. CLEANER FOR CHEMICAL MECHANICAL POLISHING APPARATUS simplified abstract (Samsung Electronics Co., Ltd.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 28 June 2024 02:56 UTC
- Date retrieved: 5 July 2024 01:30 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18226873._CLEANER_FOR_CHEMICAL_MECHANICAL_POLISHING_APPARATUS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=78791
- Page Version ID: 78791
Citation styles for 18226873. CLEANER FOR CHEMICAL MECHANICAL POLISHING APPARATUS simplified abstract (Samsung Electronics Co., Ltd.)
APA style
18226873. CLEANER FOR CHEMICAL MECHANICAL POLISHING APPARATUS simplified abstract (Samsung Electronics Co., Ltd.). (2024, June 28). WikiPatents, . Retrieved 01:30, July 5, 2024 from http://wikipatents.org/index.php?title=18226873._CLEANER_FOR_CHEMICAL_MECHANICAL_POLISHING_APPARATUS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=78791.
MLA style
"18226873. CLEANER FOR CHEMICAL MECHANICAL POLISHING APPARATUS simplified abstract (Samsung Electronics Co., Ltd.)." WikiPatents, . 28 Jun 2024, 02:56 UTC. 5 Jul 2024, 01:30 <http://wikipatents.org/index.php?title=18226873._CLEANER_FOR_CHEMICAL_MECHANICAL_POLISHING_APPARATUS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=78791>.
MHRA style
WikiPatents contributors, '18226873. CLEANER FOR CHEMICAL MECHANICAL POLISHING APPARATUS simplified abstract (Samsung Electronics Co., Ltd.)', WikiPatents, , 28 June 2024, 02:56 UTC, <http://wikipatents.org/index.php?title=18226873._CLEANER_FOR_CHEMICAL_MECHANICAL_POLISHING_APPARATUS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=78791> [accessed 5 July 2024]
Chicago style
WikiPatents contributors, "18226873. CLEANER FOR CHEMICAL MECHANICAL POLISHING APPARATUS simplified abstract (Samsung Electronics Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18226873._CLEANER_FOR_CHEMICAL_MECHANICAL_POLISHING_APPARATUS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=78791 (accessed July 5, 2024).
CBE/CSE style
WikiPatents contributors. 18226873. CLEANER FOR CHEMICAL MECHANICAL POLISHING APPARATUS simplified abstract (Samsung Electronics Co., Ltd.) [Internet]. WikiPatents, ; 2024 Jun 28, 02:56 UTC [cited 2024 Jul 5]. Available from: http://wikipatents.org/index.php?title=18226873._CLEANER_FOR_CHEMICAL_MECHANICAL_POLISHING_APPARATUS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=78791.
Bluebook style
18226873. CLEANER FOR CHEMICAL MECHANICAL POLISHING APPARATUS simplified abstract (Samsung Electronics Co., Ltd.), http://wikipatents.org/index.php?title=18226873._CLEANER_FOR_CHEMICAL_MECHANICAL_POLISHING_APPARATUS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=78791 (last visited July 5, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "18226873. CLEANER FOR CHEMICAL MECHANICAL POLISHING APPARATUS simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=18226873._CLEANER_FOR_CHEMICAL_MECHANICAL_POLISHING_APPARATUS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=78791", note = "[Online; accessed 5-July-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "18226873. CLEANER FOR CHEMICAL MECHANICAL POLISHING APPARATUS simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=18226873._CLEANER_FOR_CHEMICAL_MECHANICAL_POLISHING_APPARATUS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=78791}", note = "[Online; accessed 5-July-2024]" }